JPS56598Y2 - - Google Patents

Info

Publication number
JPS56598Y2
JPS56598Y2 JP12670378U JP12670378U JPS56598Y2 JP S56598 Y2 JPS56598 Y2 JP S56598Y2 JP 12670378 U JP12670378 U JP 12670378U JP 12670378 U JP12670378 U JP 12670378U JP S56598 Y2 JPS56598 Y2 JP S56598Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12670378U
Other languages
Japanese (ja)
Other versions
JPS5545209U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12670378U priority Critical patent/JPS56598Y2/ja
Publication of JPS5545209U publication Critical patent/JPS5545209U/ja
Application granted granted Critical
Publication of JPS56598Y2 publication Critical patent/JPS56598Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP12670378U 1978-09-14 1978-09-14 Expired JPS56598Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12670378U JPS56598Y2 (enrdf_load_html_response) 1978-09-14 1978-09-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12670378U JPS56598Y2 (enrdf_load_html_response) 1978-09-14 1978-09-14

Publications (2)

Publication Number Publication Date
JPS5545209U JPS5545209U (enrdf_load_html_response) 1980-03-25
JPS56598Y2 true JPS56598Y2 (enrdf_load_html_response) 1981-01-09

Family

ID=29088782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12670378U Expired JPS56598Y2 (enrdf_load_html_response) 1978-09-14 1978-09-14

Country Status (1)

Country Link
JP (1) JPS56598Y2 (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866637U (ja) * 1981-10-29 1983-05-06 日本真空技術株式会社 薄膜形成装置に於ける自公転偏角治具装置

Also Published As

Publication number Publication date
JPS5545209U (enrdf_load_html_response) 1980-03-25

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