JPH0289827U - - Google Patents
Info
- Publication number
- JPH0289827U JPH0289827U JP16950988U JP16950988U JPH0289827U JP H0289827 U JPH0289827 U JP H0289827U JP 16950988 U JP16950988 U JP 16950988U JP 16950988 U JP16950988 U JP 16950988U JP H0289827 U JPH0289827 U JP H0289827U
- Authority
- JP
- Japan
- Prior art keywords
- quartz boat
- shaft
- boat
- furnace
- supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 8
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図〜第４図は本考案に係るウエハー支持用
石英ボートの実施例を示す図で、第１図はウエハ
ーを支持したボートの斜視図、第２図は炉内に配
されたボートの断面図、第３図はボート摺動時に
おけるボートの要部断面図、第４図はウエハー処
理時におけるボートの要部断面図、第５図、第６
図は従来のウエハー支持用ボートを示す図で、第
５図は炉内に配されたボートの断面図、第６図は
ウエハーを支持したボートの斜視図である。
１，１１……炉、２，１２……ウエハー、３，
１３……石英ボート、３ｃ，１３ｄ……軸、３ｄ
，１３ｅ……車輪、１３ｃ……孔。
Figures 1 to 4 are views showing an embodiment of the quartz boat for supporting wafers according to the present invention. Figure 1 is a perspective view of the boat supporting wafers, and Figure 2 is a view of the boat placed in the furnace. 3 is a cross-sectional view of the main part of the boat when the boat is sliding. FIG. 4 is a cross-sectional view of the main part of the boat during wafer processing.
The figures show a conventional wafer-supporting boat, with FIG. 5 being a sectional view of the boat placed in a furnace, and FIG. 6 being a perspective view of the boat supporting wafers. 1,11...Furnace, 2,12...Wafer, 3,
13...Quartz boat, 3c, 13d...Shaft, 3d
, 13e...wheel, 13c...hole.
Claims (1)
配設されたウエハー支持用石英ボートにおいて、
前記石英ボートは軸が回動自在に貫通支持されて
おり、かつ前記軸を異なつた位置に変位支持され
るように移動可能にした構成のウエハー支持用石
英ボート。 In a wafer support quartz boat that supports a semiconductor wafer and is slidably disposed in a furnace,
The quartz boat for supporting wafers is configured such that a shaft is rotatably supported through the quartz boat, and the shaft is movable so as to be displaced and supported at different positions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16950988U JPH0289827U (en) | 1988-12-28 | 1988-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16950988U JPH0289827U (en) | 1988-12-28 | 1988-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0289827U true JPH0289827U (en) | 1990-07-17 |
Family
ID=31459634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16950988U Pending JPH0289827U (en) | 1988-12-28 | 1988-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0289827U (en) |
-
1988
- 1988-12-28 JP JP16950988U patent/JPH0289827U/ja active Pending