JPH0287069U - - Google Patents

Info

Publication number
JPH0287069U
JPH0287069U JP16674088U JP16674088U JPH0287069U JP H0287069 U JPH0287069 U JP H0287069U JP 16674088 U JP16674088 U JP 16674088U JP 16674088 U JP16674088 U JP 16674088U JP H0287069 U JPH0287069 U JP H0287069U
Authority
JP
Japan
Prior art keywords
processing
processing chambers
workpiece
processed
central axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16674088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16674088U priority Critical patent/JPH0287069U/ja
Publication of JPH0287069U publication Critical patent/JPH0287069U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP16674088U 1988-12-26 1988-12-26 Pending JPH0287069U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16674088U JPH0287069U (enrdf_load_stackoverflow) 1988-12-26 1988-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16674088U JPH0287069U (enrdf_load_stackoverflow) 1988-12-26 1988-12-26

Publications (1)

Publication Number Publication Date
JPH0287069U true JPH0287069U (enrdf_load_stackoverflow) 1990-07-10

Family

ID=31454394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16674088U Pending JPH0287069U (enrdf_load_stackoverflow) 1988-12-26 1988-12-26

Country Status (1)

Country Link
JP (1) JPH0287069U (enrdf_load_stackoverflow)

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