JPH0287068U - - Google Patents
Info
- Publication number
- JPH0287068U JPH0287068U JP16673988U JP16673988U JPH0287068U JP H0287068 U JPH0287068 U JP H0287068U JP 16673988 U JP16673988 U JP 16673988U JP 16673988 U JP16673988 U JP 16673988U JP H0287068 U JPH0287068 U JP H0287068U
- Authority
- JP
- Japan
- Prior art keywords
- processing
- workpiece
- processing chambers
- processed
- central axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16673988U JPH0287068U (enrdf_load_stackoverflow) | 1988-12-26 | 1988-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16673988U JPH0287068U (enrdf_load_stackoverflow) | 1988-12-26 | 1988-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0287068U true JPH0287068U (enrdf_load_stackoverflow) | 1990-07-10 |
Family
ID=31454392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16673988U Pending JPH0287068U (enrdf_load_stackoverflow) | 1988-12-26 | 1988-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0287068U (enrdf_load_stackoverflow) |
-
1988
- 1988-12-26 JP JP16673988U patent/JPH0287068U/ja active Pending
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