JPH02862B2 - - Google Patents

Info

Publication number
JPH02862B2
JPH02862B2 JP56062229A JP6222981A JPH02862B2 JP H02862 B2 JPH02862 B2 JP H02862B2 JP 56062229 A JP56062229 A JP 56062229A JP 6222981 A JP6222981 A JP 6222981A JP H02862 B2 JPH02862 B2 JP H02862B2
Authority
JP
Japan
Prior art keywords
wiring layer
region
drain
transistors
channel transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56062229A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57177553A (en
Inventor
Yoshihisa Shioashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56062229A priority Critical patent/JPS57177553A/ja
Priority to US06/354,034 priority patent/US4523216A/en
Publication of JPS57177553A publication Critical patent/JPS57177553A/ja
Publication of JPH02862B2 publication Critical patent/JPH02862B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
    • H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
    • H10D84/85—Complementary IGFETs, e.g. CMOS
    • H10D84/858—Complementary IGFETs, e.g. CMOS comprising a P-type well but not an N-type well
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/528—Layout of the interconnection structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP56062229A 1981-04-24 1981-04-24 Semiconductor Granted JPS57177553A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP56062229A JPS57177553A (en) 1981-04-24 1981-04-24 Semiconductor
US06/354,034 US4523216A (en) 1981-04-24 1982-03-02 CMOS device with high density wiring layout

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56062229A JPS57177553A (en) 1981-04-24 1981-04-24 Semiconductor

Publications (2)

Publication Number Publication Date
JPS57177553A JPS57177553A (en) 1982-11-01
JPH02862B2 true JPH02862B2 (cs) 1990-01-09

Family

ID=13194115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56062229A Granted JPS57177553A (en) 1981-04-24 1981-04-24 Semiconductor

Country Status (2)

Country Link
US (1) US4523216A (cs)
JP (1) JPS57177553A (cs)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4570176A (en) * 1984-04-16 1986-02-11 At&T Bell Laboratories CMOS Cell array with transistor isolation
DE3482528D1 (de) * 1984-06-19 1990-07-19 Siemens Ag In c-mos-technik realisierte basiszelle.
JPS6450443A (en) * 1987-08-20 1989-02-27 Toshiba Corp Semiconductor device
US5084404A (en) * 1988-03-31 1992-01-28 Advanced Micro Devices Gate array structure and process to allow optioning at second metal mask only
WO1989009492A1 (en) * 1988-03-31 1989-10-05 Advanced Micro Devices, Inc. Gate array structure and process to allow optioning at second metal mask only
JPH0244753A (ja) * 1988-08-05 1990-02-14 Toshiba Corp 半導体装置の製造方法
US5243219A (en) * 1990-07-05 1993-09-07 Mitsubishi Denki Kabushiki Kaisha Semiconductor device having impurity diffusion region formed in substrate beneath interlayer contact hole
US9680473B1 (en) 2016-02-18 2017-06-13 International Business Machines Corporation Ultra dense vertical transport FET circuits

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3877051A (en) * 1972-10-18 1975-04-08 Ibm Multilayer insulation integrated circuit structure
US4163242A (en) * 1972-11-13 1979-07-31 Siemens Aktiengesellschaft MOS storage integrated circuit using individual FET elements
JPS5714026B2 (cs) * 1973-08-09 1982-03-20
JPS5925381B2 (ja) * 1977-12-30 1984-06-16 富士通株式会社 半導体集積回路装置
JPS5519857A (en) * 1978-07-28 1980-02-12 Nec Corp Semiconductor
JPS5567993A (en) * 1978-11-14 1980-05-22 Fujitsu Ltd Semiconductor memory unit
JPS55132055A (en) * 1979-03-30 1980-10-14 Nec Corp Mos integrated circuit
US4356504A (en) * 1980-03-28 1982-10-26 International Microcircuits, Inc. MOS Integrated circuit structure for discretionary interconnection
US4392150A (en) * 1980-10-27 1983-07-05 National Semiconductor Corporation MOS Integrated circuit having refractory metal or metal silicide interconnect layer

Also Published As

Publication number Publication date
JPS57177553A (en) 1982-11-01
US4523216A (en) 1985-06-11

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