JPH028241B2 - - Google Patents

Info

Publication number
JPH028241B2
JPH028241B2 JP14580979A JP14580979A JPH028241B2 JP H028241 B2 JPH028241 B2 JP H028241B2 JP 14580979 A JP14580979 A JP 14580979A JP 14580979 A JP14580979 A JP 14580979A JP H028241 B2 JPH028241 B2 JP H028241B2
Authority
JP
Japan
Prior art keywords
light
detection
light emitting
reflected
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14580979A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5669507A (en
Inventor
Tadashi Furuta
Junichi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Industrial Devices SUNX Co Ltd
Original Assignee
Sunx Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sunx Ltd filed Critical Sunx Ltd
Priority to JP14580979A priority Critical patent/JPS5669507A/ja
Publication of JPS5669507A publication Critical patent/JPS5669507A/ja
Publication of JPH028241B2 publication Critical patent/JPH028241B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP14580979A 1979-11-09 1979-11-09 Recessed and protruded parts detecting device Granted JPS5669507A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14580979A JPS5669507A (en) 1979-11-09 1979-11-09 Recessed and protruded parts detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14580979A JPS5669507A (en) 1979-11-09 1979-11-09 Recessed and protruded parts detecting device

Publications (2)

Publication Number Publication Date
JPS5669507A JPS5669507A (en) 1981-06-10
JPH028241B2 true JPH028241B2 (https=) 1990-02-23

Family

ID=15393633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14580979A Granted JPS5669507A (en) 1979-11-09 1979-11-09 Recessed and protruded parts detecting device

Country Status (1)

Country Link
JP (1) JPS5669507A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5826207A (ja) * 1981-08-10 1983-02-16 Agency Of Ind Science & Technol 平面性検出装置
JP2682690B2 (ja) * 1989-01-13 1997-11-26 オリンパス光学工業株式会社 測距装置
JPH0355510A (ja) * 1989-07-25 1991-03-11 Sumitomo Cement Co Ltd 共焦点型光学顕微鏡

Also Published As

Publication number Publication date
JPS5669507A (en) 1981-06-10

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