JPH0281036U - - Google Patents
Info
- Publication number
- JPH0281036U JPH0281036U JP16042988U JP16042988U JPH0281036U JP H0281036 U JPH0281036 U JP H0281036U JP 16042988 U JP16042988 U JP 16042988U JP 16042988 U JP16042988 U JP 16042988U JP H0281036 U JPH0281036 U JP H0281036U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- plasma processing
- neutral active
- neutral
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 7
- 230000007935 neutral effect Effects 0.000 claims 5
- 238000010521 absorption reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16042988U JPH0281036U (enrdf_load_stackoverflow) | 1988-12-12 | 1988-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16042988U JPH0281036U (enrdf_load_stackoverflow) | 1988-12-12 | 1988-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0281036U true JPH0281036U (enrdf_load_stackoverflow) | 1990-06-22 |
Family
ID=31442490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16042988U Pending JPH0281036U (enrdf_load_stackoverflow) | 1988-12-12 | 1988-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0281036U (enrdf_load_stackoverflow) |
-
1988
- 1988-12-12 JP JP16042988U patent/JPH0281036U/ja active Pending
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