JPH027917B2 - - Google Patents

Info

Publication number
JPH027917B2
JPH027917B2 JP56054029A JP5402981A JPH027917B2 JP H027917 B2 JPH027917 B2 JP H027917B2 JP 56054029 A JP56054029 A JP 56054029A JP 5402981 A JP5402981 A JP 5402981A JP H027917 B2 JPH027917 B2 JP H027917B2
Authority
JP
Japan
Prior art keywords
crucible
quartz glass
pedestal
cylindrical
graphite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56054029A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57170892A (en
Inventor
Hiroshi Yamazaki
Katsumi Hoshina
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP5402981A priority Critical patent/JPS57170892A/ja
Publication of JPS57170892A publication Critical patent/JPS57170892A/ja
Publication of JPH027917B2 publication Critical patent/JPH027917B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP5402981A 1981-04-10 1981-04-10 Crucible holder made of graphite for manufacture of silicon single crystal Granted JPS57170892A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5402981A JPS57170892A (en) 1981-04-10 1981-04-10 Crucible holder made of graphite for manufacture of silicon single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5402981A JPS57170892A (en) 1981-04-10 1981-04-10 Crucible holder made of graphite for manufacture of silicon single crystal

Publications (2)

Publication Number Publication Date
JPS57170892A JPS57170892A (en) 1982-10-21
JPH027917B2 true JPH027917B2 (enrdf_load_stackoverflow) 1990-02-21

Family

ID=12959153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5402981A Granted JPS57170892A (en) 1981-04-10 1981-04-10 Crucible holder made of graphite for manufacture of silicon single crystal

Country Status (1)

Country Link
JP (1) JPS57170892A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0633218B2 (ja) * 1987-12-08 1994-05-02 日本鋼管株式会社 シリコン単結晶の製造装置
DE4130253C2 (de) * 1991-09-12 2001-10-04 Sgl Carbon Ag Mehrteiliger Stütztiegel und Verfahren zu seiner Herstellung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5113664Y2 (enrdf_load_stackoverflow) * 1971-09-16 1976-04-12
JPS5551991Y2 (enrdf_load_stackoverflow) * 1977-08-29 1980-12-03

Also Published As

Publication number Publication date
JPS57170892A (en) 1982-10-21

Similar Documents

Publication Publication Date Title
JP2002170780A (ja) ルツボおよびそれを使用した多結晶シリコンの成長方法
US7497907B2 (en) Partially devitrified crucible
JPH027917B2 (enrdf_load_stackoverflow)
US4403955A (en) Receptacle for support of a melt containing crucible
JPH0745691A (ja) ウェーハホルダ
JP3617466B2 (ja) 単結晶引上げ装置
JP3672460B2 (ja) シリコン単結晶引上用石英ガラスルツボの製造方法
JP4926633B2 (ja) 単結晶引上げ方法
JPH0438718B2 (enrdf_load_stackoverflow)
JP2000044381A (ja) 黒鉛坩堝
JPH0315550Y2 (enrdf_load_stackoverflow)
JP2000169285A (ja) 融液収容ルツボ
JP2732393B2 (ja) シリンダー型シリコンエピタキシャル層成長装置
JP3028767B2 (ja) Ｔ字型種結晶および保持治具
JPS589895A (ja) 側熱型るつぼ
JPS5895693A (ja) 単結晶引上げ用黒鉛ルツボ
JPH0255399B2 (enrdf_load_stackoverflow)
JP2000053490A (ja) 溶融ポット支持用支持ルツボ
KR102731089B1 (ko) 도가니 및 이를 포함하는 실리콘 단결정 잉곳의 성장 장치
JP2864058B2 (ja) シリコン単結晶引上げ用石英ルツボ
JPS62246893A (ja) 単結晶の製造方法及びその装置
JPH0859387A (ja) 単結晶引き上げ用黒鉛部品
JP2578126B2 (ja) シリコン単結晶引上装置用カ−ボンルツボ
JP3183352B2 (ja) 電磁誘導によるシリコンの連続鋳造方法
JPS6034027Y2 (ja) シ−ドホルダ−