JPH0438718B2 - - Google Patents
Info
- Publication number
- JPH0438718B2 JPH0438718B2 JP25185883A JP25185883A JPH0438718B2 JP H0438718 B2 JPH0438718 B2 JP H0438718B2 JP 25185883 A JP25185883 A JP 25185883A JP 25185883 A JP25185883 A JP 25185883A JP H0438718 B2 JPH0438718 B2 JP H0438718B2
- Authority
- JP
- Japan
- Prior art keywords
- graphite crucible
- slit
- pulling
- semiconductor single
- crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 27
- 229910002804 graphite Inorganic materials 0.000 claims description 27
- 239000010439 graphite Substances 0.000 claims description 27
- 239000013078 crystal Substances 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 11
- 239000002994 raw material Substances 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000001154 acute effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25185883A JPS60137893A (ja) | 1983-12-26 | 1983-12-26 | 半導体単結晶引上用黒鉛ルツボ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25185883A JPS60137893A (ja) | 1983-12-26 | 1983-12-26 | 半導体単結晶引上用黒鉛ルツボ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60137893A JPS60137893A (ja) | 1985-07-22 |
| JPH0438718B2 true JPH0438718B2 (enrdf_load_stackoverflow) | 1992-06-25 |
Family
ID=17228964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25185883A Granted JPS60137893A (ja) | 1983-12-26 | 1983-12-26 | 半導体単結晶引上用黒鉛ルツボ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60137893A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19830785A1 (de) * | 1998-07-09 | 2000-01-13 | Wacker Siltronic Halbleitermat | Stütztiegel zur Stützung von Schmelztiegeln |
| DE10055033A1 (de) * | 2000-11-07 | 2002-05-08 | Aixtron Ag | CVD-Reaktor mit grafitschaum-isoliertem, rohrförmigen Suszeptor |
| CN102713024A (zh) * | 2009-12-04 | 2012-10-03 | 太阳世界创新有限公司 | 用于保持硅熔体的装置 |
| WO2011096821A1 (en) * | 2010-02-08 | 2011-08-11 | Nordic Ceramics As | Sectioned crucible |
| CN102115909A (zh) * | 2010-10-13 | 2011-07-06 | 浙江舒奇蒙能源科技有限公司 | 一种三瓣石墨坩埚单晶炉 |
-
1983
- 1983-12-26 JP JP25185883A patent/JPS60137893A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60137893A (ja) | 1985-07-22 |
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