JPS57170892A - Crucible holder made of graphite for manufacture of silicon single crystal - Google Patents
Crucible holder made of graphite for manufacture of silicon single crystalInfo
- Publication number
- JPS57170892A JPS57170892A JP5402981A JP5402981A JPS57170892A JP S57170892 A JPS57170892 A JP S57170892A JP 5402981 A JP5402981 A JP 5402981A JP 5402981 A JP5402981 A JP 5402981A JP S57170892 A JPS57170892 A JP S57170892A
- Authority
- JP
- Japan
- Prior art keywords
- section
- crucible
- stand
- graphite
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5402981A JPS57170892A (en) | 1981-04-10 | 1981-04-10 | Crucible holder made of graphite for manufacture of silicon single crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5402981A JPS57170892A (en) | 1981-04-10 | 1981-04-10 | Crucible holder made of graphite for manufacture of silicon single crystal |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57170892A true JPS57170892A (en) | 1982-10-21 |
JPH027917B2 JPH027917B2 (ja) | 1990-02-21 |
Family
ID=12959153
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5402981A Granted JPS57170892A (en) | 1981-04-10 | 1981-04-10 | Crucible holder made of graphite for manufacture of silicon single crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57170892A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01153589A (ja) * | 1987-12-08 | 1989-06-15 | Nkk Corp | シリコン単結晶の製造装置 |
WO1993005205A1 (de) * | 1991-09-12 | 1993-03-18 | Ringsdorff-Werke Gmbh | Mehrteiliger stütztiegel |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4840666U (ja) * | 1971-09-16 | 1973-05-23 | ||
JPS5443045U (ja) * | 1977-08-29 | 1979-03-23 |
-
1981
- 1981-04-10 JP JP5402981A patent/JPS57170892A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4840666U (ja) * | 1971-09-16 | 1973-05-23 | ||
JPS5443045U (ja) * | 1977-08-29 | 1979-03-23 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01153589A (ja) * | 1987-12-08 | 1989-06-15 | Nkk Corp | シリコン単結晶の製造装置 |
WO1993005205A1 (de) * | 1991-09-12 | 1993-03-18 | Ringsdorff-Werke Gmbh | Mehrteiliger stütztiegel |
US5372090A (en) * | 1991-09-12 | 1994-12-13 | Ringsdorff-Werke Gmbh | Multipart support crucible and method for producing the same |
Also Published As
Publication number | Publication date |
---|---|
JPH027917B2 (ja) | 1990-02-21 |
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