JPH0277118A - 半導体ウェーハへの硼素拡散方法 - Google Patents

半導体ウェーハへの硼素拡散方法

Info

Publication number
JPH0277118A
JPH0277118A JP63229343A JP22934388A JPH0277118A JP H0277118 A JPH0277118 A JP H0277118A JP 63229343 A JP63229343 A JP 63229343A JP 22934388 A JP22934388 A JP 22934388A JP H0277118 A JPH0277118 A JP H0277118A
Authority
JP
Japan
Prior art keywords
boron
pbn
diffusion
silicon wafer
wafer surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63229343A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543286B2 (OSRAM
Inventor
Yoshiyuki Mori
森　義之
Shigenari Suzuki
鈴木　成就
Yoshiaki Fushiki
芳明 伏木
Sadatoshi Kumai
熊井　貞勇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Priority to JP63229343A priority Critical patent/JPH0277118A/ja
Publication of JPH0277118A publication Critical patent/JPH0277118A/ja
Publication of JPH0543286B2 publication Critical patent/JPH0543286B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P32/141—
    • H10P32/171—

Landscapes

  • Ceramic Products (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP63229343A 1988-09-13 1988-09-13 半導体ウェーハへの硼素拡散方法 Granted JPH0277118A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63229343A JPH0277118A (ja) 1988-09-13 1988-09-13 半導体ウェーハへの硼素拡散方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63229343A JPH0277118A (ja) 1988-09-13 1988-09-13 半導体ウェーハへの硼素拡散方法

Publications (2)

Publication Number Publication Date
JPH0277118A true JPH0277118A (ja) 1990-03-16
JPH0543286B2 JPH0543286B2 (OSRAM) 1993-07-01

Family

ID=16890674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63229343A Granted JPH0277118A (ja) 1988-09-13 1988-09-13 半導体ウェーハへの硼素拡散方法

Country Status (1)

Country Link
JP (1) JPH0277118A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04354165A (ja) * 1991-05-31 1992-12-08 Hitachi Ltd 太陽電池の製造方法
JPH0574727A (ja) * 1991-03-20 1993-03-26 Shin Etsu Handotai Co Ltd 半導体ウエーハへの硼素拡散方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926748A (OSRAM) * 1972-07-07 1974-03-09
JPS62101026A (ja) * 1985-10-26 1987-05-11 Shin Etsu Chem Co Ltd 不純物拡散源

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926748A (OSRAM) * 1972-07-07 1974-03-09
JPS62101026A (ja) * 1985-10-26 1987-05-11 Shin Etsu Chem Co Ltd 不純物拡散源

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0574727A (ja) * 1991-03-20 1993-03-26 Shin Etsu Handotai Co Ltd 半導体ウエーハへの硼素拡散方法
EP0504857A3 (en) * 1991-03-20 1995-04-12 Shinetsu Handotai Kk Process of diffusing boron into semiconductor wafers
JPH04354165A (ja) * 1991-05-31 1992-12-08 Hitachi Ltd 太陽電池の製造方法

Also Published As

Publication number Publication date
JPH0543286B2 (OSRAM) 1993-07-01

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