JPH027511B2 - - Google Patents
Info
- Publication number
- JPH027511B2 JPH027511B2 JP57078318A JP7831882A JPH027511B2 JP H027511 B2 JPH027511 B2 JP H027511B2 JP 57078318 A JP57078318 A JP 57078318A JP 7831882 A JP7831882 A JP 7831882A JP H027511 B2 JPH027511 B2 JP H027511B2
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- output
- data
- data collection
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 37
- 238000012545 processing Methods 0.000 claims description 26
- 230000010354 integration Effects 0.000 claims description 20
- 238000013480 data collection Methods 0.000 claims description 15
- 230000005284 excitation Effects 0.000 claims description 15
- 230000008878 coupling Effects 0.000 claims description 14
- 238000010168 coupling process Methods 0.000 claims description 14
- 238000005859 coupling reaction Methods 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 239000000523 sample Substances 0.000 description 46
- 239000003990 capacitor Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000005070 sampling Methods 0.000 description 6
- 230000002411 adverse Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 101100042258 Neurospora crassa (strain ATCC 24698 / 74-OR23-1A / CBS 708.71 / DSM 1257 / FGSC 987) sem-1 gene Proteins 0.000 description 4
- 238000012935 Averaging Methods 0.000 description 2
- 125000003821 2-(trimethylsilyl)ethoxymethyl group Chemical group [H]C([H])([H])[Si](C([H])([H])[H])(C([H])([H])[H])C([H])([H])C(OC([H])([H])[*])([H])[H] 0.000 description 1
- 101100385969 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) CYC8 gene Proteins 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57078318A JPS58197643A (ja) | 1982-05-12 | 1982-05-12 | ストロボ走査電子顕微鏡装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57078318A JPS58197643A (ja) | 1982-05-12 | 1982-05-12 | ストロボ走査電子顕微鏡装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58197643A JPS58197643A (ja) | 1983-11-17 |
| JPH027511B2 true JPH027511B2 (enrdf_load_stackoverflow) | 1990-02-19 |
Family
ID=13658589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57078318A Granted JPS58197643A (ja) | 1982-05-12 | 1982-05-12 | ストロボ走査電子顕微鏡装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58197643A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6156426A (ja) * | 1984-07-27 | 1986-03-22 | Fujitsu Ltd | 電子ビ−ム装置 |
| JPS6158152A (ja) * | 1984-08-29 | 1986-03-25 | Jeol Ltd | 走査形電子顕微鏡の分析デ−タ処理装置 |
| JP4728207B2 (ja) * | 2006-11-28 | 2011-07-20 | 株式会社日立製作所 | 検査装置 |
| JP5744629B2 (ja) | 2011-06-03 | 2015-07-08 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡及び電子線を用いた撮像方法 |
| JP6736498B2 (ja) | 2017-02-23 | 2020-08-05 | 株式会社日立ハイテク | 計測装置及び観測条件の設定方法 |
-
1982
- 1982-05-12 JP JP57078318A patent/JPS58197643A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58197643A (ja) | 1983-11-17 |
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