JPH027500B2 - - Google Patents

Info

Publication number
JPH027500B2
JPH027500B2 JP58134405A JP13440583A JPH027500B2 JP H027500 B2 JPH027500 B2 JP H027500B2 JP 58134405 A JP58134405 A JP 58134405A JP 13440583 A JP13440583 A JP 13440583A JP H027500 B2 JPH027500 B2 JP H027500B2
Authority
JP
Japan
Prior art keywords
liquid metal
needle
emitter
ion source
metal ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58134405A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6028147A (ja
Inventor
Hiroshi Yamada
Yasuhiro Torii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP58134405A priority Critical patent/JPS6028147A/ja
Publication of JPS6028147A publication Critical patent/JPS6028147A/ja
Publication of JPH027500B2 publication Critical patent/JPH027500B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP58134405A 1983-07-25 1983-07-25 液体金属イオン源 Granted JPS6028147A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58134405A JPS6028147A (ja) 1983-07-25 1983-07-25 液体金属イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58134405A JPS6028147A (ja) 1983-07-25 1983-07-25 液体金属イオン源

Publications (2)

Publication Number Publication Date
JPS6028147A JPS6028147A (ja) 1985-02-13
JPH027500B2 true JPH027500B2 (cg-RX-API-DMAC7.html) 1990-02-19

Family

ID=15127614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58134405A Granted JPS6028147A (ja) 1983-07-25 1983-07-25 液体金属イオン源

Country Status (1)

Country Link
JP (1) JPS6028147A (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0726808U (ja) * 1994-10-11 1995-05-19 矢崎総業株式会社 スペーサー型光ファイバケーブル
WO2007080594A2 (en) * 2006-01-13 2007-07-19 Technion Research & Development Foundation Ltd. Method and apparatus for generating ion beam

Also Published As

Publication number Publication date
JPS6028147A (ja) 1985-02-13

Similar Documents

Publication Publication Date Title
JP3315720B2 (ja) 液体金属イオン源及び加熱洗浄方法
KR900004762B1 (ko) 함침형 음극
JPH027500B2 (cg-RX-API-DMAC7.html)
JPS6340246A (ja) けい光ランプ
US4318030A (en) Liquid metal ion source
JP2862887B2 (ja) ガス放電管の駆動回路
JP3987436B2 (ja) ガス放電管用傍熱型電極
JP3554238B2 (ja) 冷陰極
JPWO2003030208A1 (ja) ガス放電管
JPS59228338A (ja) ホロ−カソ−ド
JPH0160891B2 (cg-RX-API-DMAC7.html)
RU2225654C2 (ru) Автотермоэлектронный катод
JP4054017B2 (ja) ガス放電管
JPS62290042A (ja) 液体金属イオン源
JPS62206745A (ja) イオン源装置
JP2025054954A (ja) 電子源、これを用いた電子銃及びデバイス
JPH04292829A (ja) 傍熱形陰極
WO2023189842A1 (ja) エミッター及びこれを備える装置
JPH1092362A (ja) 液体金属イオン源
JPH11129066A (ja) 半田鏝
JPS62216136A (ja) 液体金属イオン源
JPH02812B2 (cg-RX-API-DMAC7.html)
JP2003123621A (ja) 傍熱型陰極
JPS61279038A (ja) 液体金属イオン源
JPS63221541A (ja) 液体金属イオン源