JPS6028147A - 液体金属イオン源 - Google Patents

液体金属イオン源

Info

Publication number
JPS6028147A
JPS6028147A JP58134405A JP13440583A JPS6028147A JP S6028147 A JPS6028147 A JP S6028147A JP 58134405 A JP58134405 A JP 58134405A JP 13440583 A JP13440583 A JP 13440583A JP S6028147 A JPS6028147 A JP S6028147A
Authority
JP
Japan
Prior art keywords
liquid metal
needle
emitter
ion source
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58134405A
Other languages
English (en)
Japanese (ja)
Other versions
JPH027500B2 (cg-RX-API-DMAC7.html
Inventor
Hiroshi Yamada
宏 山田
Yasuhiro Torii
鳥居　康弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP58134405A priority Critical patent/JPS6028147A/ja
Publication of JPS6028147A publication Critical patent/JPS6028147A/ja
Publication of JPH027500B2 publication Critical patent/JPH027500B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP58134405A 1983-07-25 1983-07-25 液体金属イオン源 Granted JPS6028147A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58134405A JPS6028147A (ja) 1983-07-25 1983-07-25 液体金属イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58134405A JPS6028147A (ja) 1983-07-25 1983-07-25 液体金属イオン源

Publications (2)

Publication Number Publication Date
JPS6028147A true JPS6028147A (ja) 1985-02-13
JPH027500B2 JPH027500B2 (cg-RX-API-DMAC7.html) 1990-02-19

Family

ID=15127614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58134405A Granted JPS6028147A (ja) 1983-07-25 1983-07-25 液体金属イオン源

Country Status (1)

Country Link
JP (1) JPS6028147A (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0726808U (ja) * 1994-10-11 1995-05-19 矢崎総業株式会社 スペーサー型光ファイバケーブル
WO2007080594A3 (en) * 2006-01-13 2008-02-07 Technion Res & Dev Foundation Method and apparatus for generating ion beam

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0726808U (ja) * 1994-10-11 1995-05-19 矢崎総業株式会社 スペーサー型光ファイバケーブル
WO2007080594A3 (en) * 2006-01-13 2008-02-07 Technion Res & Dev Foundation Method and apparatus for generating ion beam
US8405326B2 (en) 2006-01-13 2013-03-26 Technion Research & Development Foundation Limited Method and apparatus for generating ion beam

Also Published As

Publication number Publication date
JPH027500B2 (cg-RX-API-DMAC7.html) 1990-02-19

Similar Documents

Publication Publication Date Title
US4088919A (en) Ion source including a pointed solid electrode and reservoir of liquid material
JP2740738B2 (ja) ガス放電管
US5200594A (en) Electrode for use in plasma arc working torch
JP3315720B2 (ja) 液体金属イオン源及び加熱洗浄方法
EP1256123B1 (en) Low input power schottky emitter
JPS6028147A (ja) 液体金属イオン源
WO2011033989A1 (ja) 電子源、電子源の製造方法及び電子放出方法
CN112786418A (zh) 一种高效抗振的离子源灯丝组件及其制造方法
JP3038814B2 (ja) プラズマアーク加工用電極
JPS63180378A (ja) プラズマジエツト発生用ト−チ
JPS59228338A (ja) ホロ−カソ−ド
JP2021186876A5 (cg-RX-API-DMAC7.html)
JPH0160891B2 (cg-RX-API-DMAC7.html)
JPS62290042A (ja) 液体金属イオン源
JP3008447B2 (ja) プラズマアーク加工用電極およびその製造方法
JP3973319B2 (ja) ワイヤボンダの電気トーチ
JPS62206745A (ja) イオン源装置
RU2225654C2 (ru) Автотермоэлектронный катод
JPS5954156A (ja) 電界放出型イオンビ−ム発生装置用電極構造
JPS601717A (ja) 電界放出型液体金属イオン源の針状エミツタ
JPS62216136A (ja) 液体金属イオン源
JPS639339B2 (cg-RX-API-DMAC7.html)
JPH08118072A (ja) アーク加工用非消耗電極の製造方法
JPS63279580A (ja) ナトリウム−硫黄２次電池
JPS6383264A (ja) 液体金属イオン源