JPH0273728U - - Google Patents
Info
- Publication number
- JPH0273728U JPH0273728U JP15329988U JP15329988U JPH0273728U JP H0273728 U JPH0273728 U JP H0273728U JP 15329988 U JP15329988 U JP 15329988U JP 15329988 U JP15329988 U JP 15329988U JP H0273728 U JPH0273728 U JP H0273728U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- resist coating
- supplying
- solvent
- supply means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 239000002904 solvent Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第1図は本考案に係るレジスト塗布装置の実施
例を示す正面図、第2図は従来例を示す正面図で
ある。
A……レジスト塗布装置、11……レジスト供
給手段、12……レジスト塗布手段、13……半
導体ウエハ(被塗布体)、14……レジスト、2
1……溶剤供給手段、22……溶剤。
FIG. 1 is a front view showing an embodiment of a resist coating apparatus according to the present invention, and FIG. 2 is a front view showing a conventional example. A...Resist coating device, 11...Resist supply means, 12...Resist coating means, 13...Semiconductor wafer (object to be coated), 14...Resist, 2
1... Solvent supply means, 22... Solvent.
Claims (1)
トを供給し、前記レジスト塗布手段が前記レジス
トを吐出して被塗布体に塗布するレジスト塗布装
置において、 前記レジスト供給手段の前段に溶剤を前記レジ
スト供給手段に供給する溶剤供給手段を設けたこ
とを特徴とするレジスト塗布装置。[Scope of Claim for Utility Model Registration] A resist coating apparatus in which a resist supplying means supplies resist to a resist coating means, and the resist coating means discharges the resist and coats it on an object to be coated; A resist coating apparatus comprising a solvent supply means for supplying a solvent to the resist supply means.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15329988U JPH0273728U (en) | 1988-11-25 | 1988-11-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15329988U JPH0273728U (en) | 1988-11-25 | 1988-11-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0273728U true JPH0273728U (en) | 1990-06-05 |
Family
ID=31429012
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15329988U Pending JPH0273728U (en) | 1988-11-25 | 1988-11-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0273728U (en) |
-
1988
- 1988-11-25 JP JP15329988U patent/JPH0273728U/ja active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0273728U (en) | ||
JPS63167728U (en) | ||
JPS6112653U (en) | Bakyu whip | |
JPS6155336U (en) | ||
JPS639130U (en) | ||
JPH0334064U (en) | ||
JPH0299964U (en) | ||
JPH0257181U (en) | ||
JPS5833850U (en) | Rope return device | |
JPS61130382U (en) | ||
JPH01143121U (en) | ||
JPH0425231U (en) | ||
JPH04734U (en) | ||
JPH0227724U (en) | ||
JPH0270429U (en) | ||
JPH0215864U (en) | ||
JPH0354774U (en) | ||
JPS62123551U (en) | ||
JPH01160831U (en) | ||
JPH042036U (en) | ||
JPH0459938U (en) | ||
JPH0220353U (en) | ||
JPH02125343U (en) | ||
JPS6031357U (en) | Support structure for backpack-type power spreader | |
JPH02115512U (en) |