JPH0354774U - - Google Patents
Info
- Publication number
- JPH0354774U JPH0354774U JP11265489U JP11265489U JPH0354774U JP H0354774 U JPH0354774 U JP H0354774U JP 11265489 U JP11265489 U JP 11265489U JP 11265489 U JP11265489 U JP 11265489U JP H0354774 U JPH0354774 U JP H0354774U
- Authority
- JP
- Japan
- Prior art keywords
- base portion
- coating
- coating liquid
- discharge portion
- coating nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
Landscapes
- Nozzles (AREA)
- Coating Apparatus (AREA)
Description
第１図はこの考案に係る実施例の塗布ノズルの
要部断面図、第２図は本考案に係る塗布ノズルを
用いた塗布装置の側面図、及び第３図は従来の塗
布ノズルの断面図である。
１０……塗布ノズル、１１……大径部、１２…
…基体部、１３……小径部、１４……薄膜、１５
……スプリング中空部材、１６……吐出部（可撓
性パイプ部材）。
FIG. 1 is a cross-sectional view of essential parts of a coating nozzle according to an embodiment of the present invention, FIG. 2 is a side view of a coating device using the coating nozzle according to the present invention, and FIG. 3 is a cross-sectional view of a conventional coating nozzle. It is. 10... Application nozzle, 11... Large diameter part, 12...
... Base part, 13 ... Small diameter part, 14 ... Thin film, 15
...Spring hollow member, 16...Discharge part (flexible pipe member).
Claims (1)
の基体部の出口側で結合される可撓性パイプ部材
の吐出部とを備えた塗布ノズルであつて、前記吐
出部はスプリング材を巻回した中空部材に薄膜を
被着して塗布液の漏出を阻止するようにしたこと
を特徴とする塗布ノズル。 A coating nozzle comprising a base portion to which a coating liquid supply pipe is connected, and a discharge portion of a flexible pipe member connected to the outlet side of the base portion, the discharge portion having a spring material wound therein. A coating nozzle characterized in that a thin film is coated on a hollow member to prevent leakage of a coating liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989112654U JPH0632873Y2 (en) | 1989-09-26 | 1989-09-26 | Automatic silicon coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989112654U JPH0632873Y2 (en) | 1989-09-26 | 1989-09-26 | Automatic silicon coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0354774U true JPH0354774U (en) | 1991-05-27 |
| JPH0632873Y2 JPH0632873Y2 (en) | 1994-08-31 |
Family
ID=31661097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989112654U Expired - Lifetime JPH0632873Y2 (en) | 1989-09-26 | 1989-09-26 | Automatic silicon coating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632873Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100719999B1 (en) * | 2005-12-09 | 2007-05-21 | 두영전자 주식회사 | Silicon applying system and method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63193545U (en) * | 1987-05-30 | 1988-12-13 |
-
1989
- 1989-09-26 JP JP1989112654U patent/JPH0632873Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63193545U (en) * | 1987-05-30 | 1988-12-13 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0632873Y2 (en) | 1994-08-31 |