JPH0263298B2 - - Google Patents
Info
- Publication number
- JPH0263298B2 JPH0263298B2 JP57018635A JP1863582A JPH0263298B2 JP H0263298 B2 JPH0263298 B2 JP H0263298B2 JP 57018635 A JP57018635 A JP 57018635A JP 1863582 A JP1863582 A JP 1863582A JP H0263298 B2 JPH0263298 B2 JP H0263298B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- region
- conductivity type
- film
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57018635A JPS58135675A (ja) | 1982-02-08 | 1982-02-08 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57018635A JPS58135675A (ja) | 1982-02-08 | 1982-02-08 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58135675A JPS58135675A (ja) | 1983-08-12 |
| JPH0263298B2 true JPH0263298B2 (enrdf_load_stackoverflow) | 1990-12-27 |
Family
ID=11977064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57018635A Granted JPS58135675A (ja) | 1982-02-08 | 1982-02-08 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58135675A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02249280A (ja) * | 1989-03-22 | 1990-10-05 | Komatsu Ltd | 半導体装置 |
-
1982
- 1982-02-08 JP JP57018635A patent/JPS58135675A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58135675A (ja) | 1983-08-12 |
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