JPH0260231B2 - - Google Patents

Info

Publication number
JPH0260231B2
JPH0260231B2 JP60195947A JP19594785A JPH0260231B2 JP H0260231 B2 JPH0260231 B2 JP H0260231B2 JP 60195947 A JP60195947 A JP 60195947A JP 19594785 A JP19594785 A JP 19594785A JP H0260231 B2 JPH0260231 B2 JP H0260231B2
Authority
JP
Japan
Prior art keywords
bonding
layer
etching
etching mask
junction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60195947A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6257264A (ja
Inventor
Mutsuo Hidaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60195947A priority Critical patent/JPS6257264A/ja
Publication of JPS6257264A publication Critical patent/JPS6257264A/ja
Publication of JPH0260231B2 publication Critical patent/JPH0260231B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N69/00—Integrated devices, or assemblies of multiple devices, comprising at least one superconducting element covered by group H10N60/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP60195947A 1985-09-06 1985-09-06 超伝導集積回路の製造方法 Granted JPS6257264A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60195947A JPS6257264A (ja) 1985-09-06 1985-09-06 超伝導集積回路の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60195947A JPS6257264A (ja) 1985-09-06 1985-09-06 超伝導集積回路の製造方法

Publications (2)

Publication Number Publication Date
JPS6257264A JPS6257264A (ja) 1987-03-12
JPH0260231B2 true JPH0260231B2 (enExample) 1990-12-14

Family

ID=16349621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60195947A Granted JPS6257264A (ja) 1985-09-06 1985-09-06 超伝導集積回路の製造方法

Country Status (1)

Country Link
JP (1) JPS6257264A (enExample)

Also Published As

Publication number Publication date
JPS6257264A (ja) 1987-03-12

Similar Documents

Publication Publication Date Title
JPH0322711B2 (enExample)
JPS6146081A (ja) ジヨセフソン接合素子の製造方法
JP2827572B2 (ja) 層状超伝導体回路とその製造方法
CN114497344B (zh) 深亚微米约瑟夫森隧道结及其制备方法
JP2646440B2 (ja) ジョセフソン接合素子の製造方法
JPS6257264A (ja) 超伝導集積回路の製造方法
US4525730A (en) Buried junction Josephson interferometer
JP2994304B2 (ja) 超伝導集積回路および超伝導集積回路の製造方法
JPS603796B2 (ja) 超電導回路用コンタクト
JPS5979585A (ja) ジヨセフソン接合素子とその製造方法
JP2656364B2 (ja) 超電導素子の製造方法
JPS61144892A (ja) シヨセフソン集積回路の製造方法
JP2616745B2 (ja) 超伝導層間のコンタクト構造及びその製造方法
JPS6164178A (ja) 超伝導回路の製法
JPS6060787A (ja) 超伝導回路装置における絶縁領域の形成方法
JP2989943B2 (ja) 超電導集積回路の製造方法
JPS58145177A (ja) ジヨセフソン接合素子の製造方法
JPS58147183A (ja) ジヨセフソン集積回路の製造方法
JPH0260230B2 (enExample)
JPH053754B2 (enExample)
JPH0149025B2 (enExample)
JPS61244078A (ja) 超伝導線路の作製方法
EP0080532A1 (en) Buried junction Josephson interferometer
JPH0234195B2 (enExample)
JPS6224677A (ja) 超伝導回路用接地面の形成方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term