JPH0258791B2 - - Google Patents

Info

Publication number
JPH0258791B2
JPH0258791B2 JP55136284A JP13628480A JPH0258791B2 JP H0258791 B2 JPH0258791 B2 JP H0258791B2 JP 55136284 A JP55136284 A JP 55136284A JP 13628480 A JP13628480 A JP 13628480A JP H0258791 B2 JPH0258791 B2 JP H0258791B2
Authority
JP
Japan
Prior art keywords
junction
layer
concentration
guard ring
impurity concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55136284A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5760876A (en
Inventor
Katsuhiko Nishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP55136284A priority Critical patent/JPS5760876A/ja
Publication of JPS5760876A publication Critical patent/JPS5760876A/ja
Publication of JPH0258791B2 publication Critical patent/JPH0258791B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/225Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier working in avalanche mode, e.g. avalanche photodiodes
    • H10F30/2255Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier working in avalanche mode, e.g. avalanche photodiodes in which the active layers form heterostructures, e.g. SAM structures

Landscapes

  • Light Receiving Elements (AREA)
JP55136284A 1980-09-30 1980-09-30 Avalanche photodiode Granted JPS5760876A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55136284A JPS5760876A (en) 1980-09-30 1980-09-30 Avalanche photodiode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55136284A JPS5760876A (en) 1980-09-30 1980-09-30 Avalanche photodiode

Publications (2)

Publication Number Publication Date
JPS5760876A JPS5760876A (en) 1982-04-13
JPH0258791B2 true JPH0258791B2 (enrdf_load_stackoverflow) 1990-12-10

Family

ID=15171573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55136284A Granted JPS5760876A (en) 1980-09-30 1980-09-30 Avalanche photodiode

Country Status (1)

Country Link
JP (1) JPS5760876A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60196979A (ja) * 1984-03-21 1985-10-05 Nec Corp 半導体装置
US5446308A (en) * 1994-04-04 1995-08-29 General Electric Company Deep-diffused planar avalanche photodiode
US5438217A (en) * 1994-04-29 1995-08-01 General Electric Company Planar avalanche photodiode array with sidewall segment

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
APPLIED PHYSICS LETTER *

Also Published As

Publication number Publication date
JPS5760876A (en) 1982-04-13

Similar Documents

Publication Publication Date Title
US4083062A (en) Avalanche photodiode with reduced avalanche breakdown voltage
EP1470575B1 (en) Mesa structure avalanche photodiode
US4442444A (en) Avalanche photodiodes
US3534231A (en) Low bulk leakage current avalanche photodiode
US3978511A (en) Semiconductor diode and method of manufacturing same
CN101312221A (zh) 半导体受光元件及其制造方法
KR850008558A (ko) 애벌란시 광전 다이오우드의 제조방법 및 애벌란시 광전 다이오우드
JP2020107901A (ja) 平面のアバランシェ・フォトダイオード
US4517582A (en) Asymmetrical thyristor with highly doped anode base layer region for optimized blocking and forward voltages
US4129878A (en) Multi-element avalanche photodiode having reduced electrical noise
KR910009357B1 (ko) 반도체 포토-다이오드
US4079403A (en) Thyristor device with self-protection against breakover turn-on failure
CN111066157A (zh) 半导体受光元件及其制造方法
US3514846A (en) Method of fabricating a planar avalanche photodiode
JPH0258791B2 (enrdf_load_stackoverflow)
EP1741127A1 (en) Planar avalanche photodiode
US5336924A (en) Zener diode having a reference diode and a protective diode
JPH0157509B2 (enrdf_load_stackoverflow)
KR970054557A (ko) 초고속 애벌랜치 포토다이오드 및 제조방법
JP2763352B2 (ja) 半導体受光素子
JP3074574B2 (ja) 半導体受光素子の製造方法
JPS6222545B2 (enrdf_load_stackoverflow)
JPH0231509B2 (enrdf_load_stackoverflow)
GB1602126A (en) Semiconductor avalanche radiation device
JPS5830168A (ja) 半導体受光素子の製造方法