JPH0257643B2 - - Google Patents
Info
- Publication number
- JPH0257643B2 JPH0257643B2 JP19010884A JP19010884A JPH0257643B2 JP H0257643 B2 JPH0257643 B2 JP H0257643B2 JP 19010884 A JP19010884 A JP 19010884A JP 19010884 A JP19010884 A JP 19010884A JP H0257643 B2 JPH0257643 B2 JP H0257643B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- measurement light
- light
- scanning
- counters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 74
- 238000001514 detection method Methods 0.000 claims description 40
- 230000003287 optical effect Effects 0.000 claims description 15
- 238000003708 edge detection Methods 0.000 claims 1
- 230000000295 complement effect Effects 0.000 description 13
- 230000009471 action Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000001360 synchronised effect Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009699 differential effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19010884A JPS6166907A (ja) | 1984-09-10 | 1984-09-10 | 光学測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19010884A JPS6166907A (ja) | 1984-09-10 | 1984-09-10 | 光学測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6166907A JPS6166907A (ja) | 1986-04-05 |
| JPH0257643B2 true JPH0257643B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-05 |
Family
ID=16252506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19010884A Granted JPS6166907A (ja) | 1984-09-10 | 1984-09-10 | 光学測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166907A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4812568B2 (ja) * | 2006-09-07 | 2011-11-09 | 株式会社ミツトヨ | 光学式測定装置、光学式測定方法、及び光学式測定処理プログラム |
-
1984
- 1984-09-10 JP JP19010884A patent/JPS6166907A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6166907A (ja) | 1986-04-05 |