JPH0256825B2 - - Google Patents
Info
- Publication number
- JPH0256825B2 JPH0256825B2 JP59034044A JP3404484A JPH0256825B2 JP H0256825 B2 JPH0256825 B2 JP H0256825B2 JP 59034044 A JP59034044 A JP 59034044A JP 3404484 A JP3404484 A JP 3404484A JP H0256825 B2 JPH0256825 B2 JP H0256825B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- thickness
- piezoelectric element
- piezoelectric actuator
- bent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005452 bending Methods 0.000 description 18
- 230000005684 electric field Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000012790 adhesive layer Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000008602 contraction Effects 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 230000006378 damage Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59034044A JPS60178677A (ja) | 1984-02-24 | 1984-02-24 | 屈曲形圧電アクチユエ−タ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59034044A JPS60178677A (ja) | 1984-02-24 | 1984-02-24 | 屈曲形圧電アクチユエ−タ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60178677A JPS60178677A (ja) | 1985-09-12 |
JPH0256825B2 true JPH0256825B2 (cs) | 1990-12-03 |
Family
ID=12403314
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59034044A Granted JPS60178677A (ja) | 1984-02-24 | 1984-02-24 | 屈曲形圧電アクチユエ−タ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60178677A (cs) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0436231Y2 (cs) * | 1985-06-28 | 1992-08-26 | ||
JPH01261879A (ja) * | 1988-04-13 | 1989-10-18 | Jgc Corp | 積層型変位素子 |
JPH02240977A (ja) * | 1989-03-14 | 1990-09-25 | Toshiba Corp | 変位発生装置 |
JP3185226B2 (ja) * | 1991-01-30 | 2001-07-09 | 株式会社村田製作所 | 圧電バイモルフ素子の駆動方法及び圧電バイモルフ素子 |
DE4332966A1 (de) * | 1993-09-28 | 1995-03-30 | Philips Patentverwaltung | Torsionsaktuator und ein Verfahren zu dessen Herstellung |
JPH0774410A (ja) * | 1994-09-06 | 1995-03-17 | Ngk Spark Plug Co Ltd | 電歪積層板の製造方法 |
US5834879A (en) * | 1996-01-11 | 1998-11-10 | Wac Data Services Co., Ltd. | Stacked piezoelectric actuator |
EP1019972B1 (de) * | 1997-09-30 | 2006-11-15 | Argillon GmbH | Piezoelektrisches element |
SG97764A1 (en) * | 1998-08-21 | 2003-08-20 | Inst Data Storage | Multilayer piezoeletric actuator with bending deformation and method for its manufacture |
US6367132B2 (en) * | 1998-08-31 | 2002-04-09 | Eastman Kodak Company | Method of making a print head |
CN1235329C (zh) | 1998-12-21 | 2006-01-04 | 精工爱普生株式会社 | 压电驱动装置、钟表和携带装置 |
JP2000332313A (ja) | 1999-05-21 | 2000-11-30 | Matsushita Electric Ind Co Ltd | 薄膜圧電型バイモルフ素子及びその応用 |
JP4631124B2 (ja) * | 2000-03-30 | 2011-02-16 | セイコーエプソン株式会社 | 圧電アクチュエータ、時計および機器 |
KR100485596B1 (ko) * | 2002-06-04 | 2005-04-27 | 한국과학기술연구원 | 밴더형 적층 액츄에이터 |
US6888291B2 (en) * | 2002-10-31 | 2005-05-03 | The Boeing Company | Electrical system for electrostrictive bimorph actuator |
DE102007003280A1 (de) * | 2007-01-23 | 2008-07-24 | Epcos Ag | Piezoelektrisches Bauelement |
-
1984
- 1984-02-24 JP JP59034044A patent/JPS60178677A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60178677A (ja) | 1985-09-12 |
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