JPH0256587B2 - - Google Patents

Info

Publication number
JPH0256587B2
JPH0256587B2 JP29396985A JP29396985A JPH0256587B2 JP H0256587 B2 JPH0256587 B2 JP H0256587B2 JP 29396985 A JP29396985 A JP 29396985A JP 29396985 A JP29396985 A JP 29396985A JP H0256587 B2 JPH0256587 B2 JP H0256587B2
Authority
JP
Japan
Prior art keywords
furnace
atmospheric gas
pressure
temperature
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP29396985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62153683A (ja
Inventor
Kyoshi Kimura
Tatsuo Suzuki
Susumu Ito
Hiroshi Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP29396985A priority Critical patent/JPS62153683A/ja
Publication of JPS62153683A publication Critical patent/JPS62153683A/ja
Publication of JPH0256587B2 publication Critical patent/JPH0256587B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vertical, Hearth, Or Arc Furnaces (AREA)
  • Furnace Details (AREA)
JP29396985A 1985-12-26 1985-12-26 バツチ式電気炉 Granted JPS62153683A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29396985A JPS62153683A (ja) 1985-12-26 1985-12-26 バツチ式電気炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29396985A JPS62153683A (ja) 1985-12-26 1985-12-26 バツチ式電気炉

Publications (2)

Publication Number Publication Date
JPS62153683A JPS62153683A (ja) 1987-07-08
JPH0256587B2 true JPH0256587B2 (zh) 1990-11-30

Family

ID=17801535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29396985A Granted JPS62153683A (ja) 1985-12-26 1985-12-26 バツチ式電気炉

Country Status (1)

Country Link
JP (1) JPS62153683A (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02203299A (ja) * 1989-02-01 1990-08-13 Power Reactor & Nuclear Fuel Dev Corp グローブボックス接続バッチ式外熱型電気炉の冷却方法
DE112009002335B4 (de) * 2008-09-26 2013-09-19 Ulvac, Inc. Schmelzofen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4191598A (en) * 1978-08-21 1980-03-04 Midland-Ross Corporation Jet recirculation method for vacuum carburizing
JPS565998U (zh) * 1979-06-28 1981-01-20

Also Published As

Publication number Publication date
JPS62153683A (ja) 1987-07-08

Similar Documents

Publication Publication Date Title
JP2002075890A (ja) 熱処理装置の降温レート制御方法および熱処理装置
JP4480231B2 (ja) 金属製ワークピースのコンベクション式ろう付け方法およびその装置
KR100559820B1 (ko) 열처리 장치 및 열처리 방법
TW201738963A (zh) 熱處理裝置
JPH0256587B2 (zh)
JP3111395B2 (ja) 熱処理装置
JP2808632B2 (ja) 真空炉における被処理物の冷却方法及び真空炉
JPH0379985A (ja) 電気炉の温度制御方法
JP2572017B2 (ja) マツフル炉における処理物の冷却方法
JP2005183596A (ja) 熱処理装置および半導体装置の製造方法
JP2968062B2 (ja) 半導体加熱処理装置
JP2570201B2 (ja) 熱処理炉
JPH031066A (ja) 熱処理炉における冷却システム
JP3525074B2 (ja) バッチオーブン
RU2705186C1 (ru) Способ охлаждения заготовки в вакуумной камере нагрева вакуумной печи и вакуумная печь
JPS60262914A (ja) ガス冷式真空炉のガス冷却装置
JPH06101378B2 (ja) 密閉形加熱炉
CN109468449B (zh) 一种控速冷却的热处理炉
JPH05121344A (ja) 縦型炉及び温度制御方法
JP3208836B2 (ja) 熱処理炉の始動方法
JPS59159927A (ja) 熱処理装置
JPH0633946B2 (ja) 連続熱処理炉
JPS59159926A (ja) 熱処理装置
JPH0529261A (ja) ステージ温調装置
JPH0293019A (ja) 熱処理方法

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees