JPH025597Y2 - - Google Patents
Info
- Publication number
- JPH025597Y2 JPH025597Y2 JP1985046518U JP4651885U JPH025597Y2 JP H025597 Y2 JPH025597 Y2 JP H025597Y2 JP 1985046518 U JP1985046518 U JP 1985046518U JP 4651885 U JP4651885 U JP 4651885U JP H025597 Y2 JPH025597 Y2 JP H025597Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- photomask blank
- holder
- insertion member
- corner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 48
- 238000003780 insertion Methods 0.000 claims description 36
- 230000037431 insertion Effects 0.000 claims description 36
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 description 17
- 238000005530 etching Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985046518U JPH025597Y2 (US07655688-20100202-C00086.png) | 1985-03-29 | 1985-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985046518U JPH025597Y2 (US07655688-20100202-C00086.png) | 1985-03-29 | 1985-03-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61161286U JPS61161286U (US07655688-20100202-C00086.png) | 1986-10-06 |
| JPH025597Y2 true JPH025597Y2 (US07655688-20100202-C00086.png) | 1990-02-09 |
Family
ID=30560987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985046518U Expired JPH025597Y2 (US07655688-20100202-C00086.png) | 1985-03-29 | 1985-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH025597Y2 (US07655688-20100202-C00086.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101313648B1 (ko) * | 2005-12-30 | 2013-10-02 | 엘지디스플레이 주식회사 | 백라이트 어셈블리의 운반용 트레이 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5327148Y2 (US07655688-20100202-C00086.png) * | 1974-05-29 | 1978-07-10 | ||
| JPS5736016Y2 (US07655688-20100202-C00086.png) * | 1977-12-26 | 1982-08-09 |
-
1985
- 1985-03-29 JP JP1985046518U patent/JPH025597Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61161286U (US07655688-20100202-C00086.png) | 1986-10-06 |
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