JPH0251248B2 - - Google Patents

Info

Publication number
JPH0251248B2
JPH0251248B2 JP13033285A JP13033285A JPH0251248B2 JP H0251248 B2 JPH0251248 B2 JP H0251248B2 JP 13033285 A JP13033285 A JP 13033285A JP 13033285 A JP13033285 A JP 13033285A JP H0251248 B2 JPH0251248 B2 JP H0251248B2
Authority
JP
Japan
Prior art keywords
melt
layer
loading chamber
epitaxial growth
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13033285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61287221A (ja
Inventor
Hiroshi Hayashi
Taiji Morimoto
Saburo Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP13033285A priority Critical patent/JPS61287221A/ja
Publication of JPS61287221A publication Critical patent/JPS61287221A/ja
Publication of JPH0251248B2 publication Critical patent/JPH0251248B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Semiconductor Lasers (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP13033285A 1985-06-14 1985-06-14 液相エピタキシヤル成長法および装置 Granted JPS61287221A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13033285A JPS61287221A (ja) 1985-06-14 1985-06-14 液相エピタキシヤル成長法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13033285A JPS61287221A (ja) 1985-06-14 1985-06-14 液相エピタキシヤル成長法および装置

Publications (2)

Publication Number Publication Date
JPS61287221A JPS61287221A (ja) 1986-12-17
JPH0251248B2 true JPH0251248B2 (enrdf_load_stackoverflow) 1990-11-06

Family

ID=15031827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13033285A Granted JPS61287221A (ja) 1985-06-14 1985-06-14 液相エピタキシヤル成長法および装置

Country Status (1)

Country Link
JP (1) JPS61287221A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS61287221A (ja) 1986-12-17

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees