JPH0250600B2 - - Google Patents

Info

Publication number
JPH0250600B2
JPH0250600B2 JP60012510A JP1251085A JPH0250600B2 JP H0250600 B2 JPH0250600 B2 JP H0250600B2 JP 60012510 A JP60012510 A JP 60012510A JP 1251085 A JP1251085 A JP 1251085A JP H0250600 B2 JPH0250600 B2 JP H0250600B2
Authority
JP
Japan
Prior art keywords
plasma
discharge
short circuit
electrode
discharge switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60012510A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61173496A (ja
Inventor
Ikuo Okada
Yasunao Saito
Hideo Yoshihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP60012510A priority Critical patent/JPS61173496A/ja
Publication of JPS61173496A publication Critical patent/JPS61173496A/ja
Publication of JPH0250600B2 publication Critical patent/JPH0250600B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/007—Production of X-ray radiation generated from plasma involving electric or magnetic fields in the process of plasma generation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • X-Ray Techniques (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60012510A 1985-01-28 1985-01-28 プラズマｘ線発生装置 Granted JPS61173496A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60012510A JPS61173496A (ja) 1985-01-28 1985-01-28 プラズマｘ線発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60012510A JPS61173496A (ja) 1985-01-28 1985-01-28 プラズマｘ線発生装置

Publications (2)

Publication Number Publication Date
JPS61173496A JPS61173496A (ja) 1986-08-05
JPH0250600B2 true JPH0250600B2 (enExample) 1990-11-02

Family

ID=11807339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60012510A Granted JPS61173496A (ja) 1985-01-28 1985-01-28 プラズマｘ線発生装置

Country Status (1)

Country Link
JP (1) JPS61173496A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2241116C (en) 1998-06-19 2009-08-25 Liyan Zhang Radiation (e.g. x-ray pulse) generator mechanisms
EP1756742A2 (en) 2004-05-28 2007-02-28 Philips Intellectual Property & Standards GmbH System for the noninvasive determination of tracer concentration in blood
DE102004058500A1 (de) * 2004-12-04 2006-06-08 Philips Intellectual Property & Standards Gmbh Verfahren und Vorrichtung zum Betreiben einer elektrischen Entladevorrichtung
US20090091273A1 (en) * 2005-05-06 2009-04-09 Tokyo Institute Of Technology Light source for generating extreme ultraviolet light from plasma
US7502446B2 (en) 2005-10-18 2009-03-10 Alft Inc. Soft x-ray generator
JP6303894B2 (ja) * 2014-07-28 2018-04-04 株式会社Ihi プラズマ光源システム

Also Published As

Publication number Publication date
JPS61173496A (ja) 1986-08-05

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term