JPH0249714Y2 - - Google Patents
Info
- Publication number
- JPH0249714Y2 JPH0249714Y2 JP11138084U JP11138084U JPH0249714Y2 JP H0249714 Y2 JPH0249714 Y2 JP H0249714Y2 JP 11138084 U JP11138084 U JP 11138084U JP 11138084 U JP11138084 U JP 11138084U JP H0249714 Y2 JPH0249714 Y2 JP H0249714Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chuck holder
- vertical grooves
- boat
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 152
- 238000000034 method Methods 0.000 description 18
- 239000004065 semiconductor Substances 0.000 description 15
- 238000010438 heat treatment Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 210000000078 claw Anatomy 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
- Feeding Of Workpieces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11138084U JPS6127640U (ja) | 1984-07-23 | 1984-07-23 | ウエハ−移載用チヤツクホルダ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11138084U JPS6127640U (ja) | 1984-07-23 | 1984-07-23 | ウエハ−移載用チヤツクホルダ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6127640U JPS6127640U (ja) | 1986-02-19 |
| JPH0249714Y2 true JPH0249714Y2 (enrdf_load_stackoverflow) | 1990-12-27 |
Family
ID=30670474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11138084U Granted JPS6127640U (ja) | 1984-07-23 | 1984-07-23 | ウエハ−移載用チヤツクホルダ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6127640U (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4929227A (en) * | 1987-10-16 | 1990-05-29 | Westfalia Separator Ag | Centrifuge drum for separating mixtures of liquids |
| JPH0714913U (ja) * | 1992-10-22 | 1995-03-14 | 株式会社一陽 | 折畳杖 |
-
1984
- 1984-07-23 JP JP11138084U patent/JPS6127640U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6127640U (ja) | 1986-02-19 |
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