JPS6127640U - ウエハ−移載用チヤツクホルダ− - Google Patents

ウエハ−移載用チヤツクホルダ−

Info

Publication number
JPS6127640U
JPS6127640U JP11138084U JP11138084U JPS6127640U JP S6127640 U JPS6127640 U JP S6127640U JP 11138084 U JP11138084 U JP 11138084U JP 11138084 U JP11138084 U JP 11138084U JP S6127640 U JPS6127640 U JP S6127640U
Authority
JP
Japan
Prior art keywords
chuck holder
wafer
pair
wafer transfer
curvature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11138084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249714Y2 (enrdf_load_stackoverflow
Inventor
明和 小久保
晴彦 牧野
和弘 杉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP11138084U priority Critical patent/JPS6127640U/ja
Publication of JPS6127640U publication Critical patent/JPS6127640U/ja
Application granted granted Critical
Publication of JPH0249714Y2 publication Critical patent/JPH0249714Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Feeding Of Workpieces (AREA)
JP11138084U 1984-07-23 1984-07-23 ウエハ−移載用チヤツクホルダ− Granted JPS6127640U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11138084U JPS6127640U (ja) 1984-07-23 1984-07-23 ウエハ−移載用チヤツクホルダ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11138084U JPS6127640U (ja) 1984-07-23 1984-07-23 ウエハ−移載用チヤツクホルダ−

Publications (2)

Publication Number Publication Date
JPS6127640U true JPS6127640U (ja) 1986-02-19
JPH0249714Y2 JPH0249714Y2 (enrdf_load_stackoverflow) 1990-12-27

Family

ID=30670474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11138084U Granted JPS6127640U (ja) 1984-07-23 1984-07-23 ウエハ−移載用チヤツクホルダ−

Country Status (1)

Country Link
JP (1) JPS6127640U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01139159A (ja) * 1987-10-16 1989-05-31 Westfalia Separator Ag 遠心ドラム
JPH0714913U (ja) * 1992-10-22 1995-03-14 株式会社一陽 折畳杖

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01139159A (ja) * 1987-10-16 1989-05-31 Westfalia Separator Ag 遠心ドラム
JPH0714913U (ja) * 1992-10-22 1995-03-14 株式会社一陽 折畳杖

Also Published As

Publication number Publication date
JPH0249714Y2 (enrdf_load_stackoverflow) 1990-12-27

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