JPH0249710Y2 - - Google Patents
Info
- Publication number
- JPH0249710Y2 JPH0249710Y2 JP11405284U JP11405284U JPH0249710Y2 JP H0249710 Y2 JPH0249710 Y2 JP H0249710Y2 JP 11405284 U JP11405284 U JP 11405284U JP 11405284 U JP11405284 U JP 11405284U JP H0249710 Y2 JPH0249710 Y2 JP H0249710Y2
- Authority
- JP
- Japan
- Prior art keywords
- wall
- opening
- bar
- substrate holder
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 23
- 238000002161 passivation Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11405284U JPS6130238U (ja) | 1984-07-26 | 1984-07-26 | パツシベ−シヨン用基板ホルダ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11405284U JPS6130238U (ja) | 1984-07-26 | 1984-07-26 | パツシベ−シヨン用基板ホルダ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6130238U JPS6130238U (ja) | 1986-02-24 |
| JPH0249710Y2 true JPH0249710Y2 (enEXAMPLES) | 1990-12-27 |
Family
ID=30673080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11405284U Granted JPS6130238U (ja) | 1984-07-26 | 1984-07-26 | パツシベ−シヨン用基板ホルダ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6130238U (enEXAMPLES) |
-
1984
- 1984-07-26 JP JP11405284U patent/JPS6130238U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6130238U (ja) | 1986-02-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4788931A (en) | Tool for forming external electrodes of chip parts | |
| KR100578281B1 (ko) | 일체형 이온 포커스 링을 가진 정전 지지 어셈블리 | |
| US20080121183A1 (en) | Deposition Method for Semiconductor Laser Bars Using a Clamping Jig | |
| US20030111961A1 (en) | Gas distribution plate electrode for a plasma reactor | |
| US5451290A (en) | Gas distribution system | |
| JPH05166741A (ja) | 熱処理装置用基板支持具 | |
| US8251009B2 (en) | Shadow frame having alignment inserts | |
| JPS62286053A (ja) | マスクホルダ | |
| JPH0249710Y2 (enEXAMPLES) | ||
| JPH04148549A (ja) | 半導体装置の評価方法 | |
| JPH03501138A (ja) | プラズマで高めた化学蒸着ウエーハ保持固定具 | |
| JPH0556013B2 (enEXAMPLES) | ||
| KR102670160B1 (ko) | 기판처리장치 | |
| JPH0622980Y2 (ja) | Ｃｖｄ装置における基板支持装置 | |
| JPH0650983Y2 (ja) | 薄膜形成装置の基板カート | |
| JPS63153876A (ja) | 半導体レ−ザの端面処理方法及びそれに使用する治具 | |
| JPH0129004Y2 (enEXAMPLES) | ||
| CN221313951U (zh) | 一种巴条夹持治具 | |
| JPS63285928A (ja) | 半導体製造装置 | |
| JPS59142837A (ja) | 量産型気相成長装置 | |
| JPS622524A (ja) | 気相成長装置 | |
| JPH03201429A (ja) | 縦型ｃｖｄ装置用ウエハホルダー | |
| JPH0513004Y2 (enEXAMPLES) | ||
| JPS58182822A (ja) | 薄膜の内部応力除去装置 | |
| JPH0267726A (ja) | 半導体装置の製造方法 |