JPH0248626B2 - - Google Patents

Info

Publication number
JPH0248626B2
JPH0248626B2 JP63138630A JP13863088A JPH0248626B2 JP H0248626 B2 JPH0248626 B2 JP H0248626B2 JP 63138630 A JP63138630 A JP 63138630A JP 13863088 A JP13863088 A JP 13863088A JP H0248626 B2 JPH0248626 B2 JP H0248626B2
Authority
JP
Japan
Prior art keywords
film
film forming
substrate
atmospheric pressure
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63138630A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01306569A (ja
Inventor
Sachiko Okazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shingijutsu Kaihatsu Jigyodan
Original Assignee
Shingijutsu Kaihatsu Jigyodan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shingijutsu Kaihatsu Jigyodan filed Critical Shingijutsu Kaihatsu Jigyodan
Priority to JP63138630A priority Critical patent/JPH01306569A/ja
Priority to EP89305671A priority patent/EP0346055B1/en
Priority to DE68922244T priority patent/DE68922244T2/de
Publication of JPH01306569A publication Critical patent/JPH01306569A/ja
Priority to US07/522,462 priority patent/US5126164A/en
Publication of JPH0248626B2 publication Critical patent/JPH0248626B2/ja
Priority to US07/774,143 priority patent/US5275665A/en
Priority to US08/401,290 priority patent/US5733610A/en
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP63138630A 1988-06-06 1988-06-06 薄膜形成方法とその装置 Granted JPH01306569A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP63138630A JPH01306569A (ja) 1988-06-06 1988-06-06 薄膜形成方法とその装置
EP89305671A EP0346055B1 (en) 1988-06-06 1989-06-06 Method for causing plasma reaction under atmospheric pressure
DE68922244T DE68922244T2 (de) 1988-06-06 1989-06-06 Verfahren zur Durchführung einer Plasmareaktion bei Atmosphärendruck.
US07/522,462 US5126164A (en) 1988-06-06 1990-05-14 Method of forming a thin polymeric film by plasma reaction under atmospheric pressure
US07/774,143 US5275665A (en) 1988-06-06 1991-10-15 Method and apparatus for causing plasma reaction under atmospheric pressure
US08/401,290 US5733610A (en) 1988-06-06 1995-03-09 Atmospheric pressure plasma reaction method of forming a hydrophobic film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63138630A JPH01306569A (ja) 1988-06-06 1988-06-06 薄膜形成方法とその装置

Publications (2)

Publication Number Publication Date
JPH01306569A JPH01306569A (ja) 1989-12-11
JPH0248626B2 true JPH0248626B2 (enExample) 1990-10-25

Family

ID=15226546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63138630A Granted JPH01306569A (ja) 1988-06-06 1988-06-06 薄膜形成方法とその装置

Country Status (1)

Country Link
JP (1) JPH01306569A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003041372A (ja) * 2001-08-02 2003-02-13 Konica Corp 大気圧プラズマ処理装置及び大気圧プラズマ処理方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2929651B2 (ja) * 1990-03-14 1999-08-03 株式会社ブリヂストン ゴム系複合材料の製造方法
JP2897055B2 (ja) * 1990-03-14 1999-05-31 株式会社ブリヂストン ゴム系複合材料の製造方法
JP3206095B2 (ja) * 1991-04-12 2001-09-04 株式会社ブリヂストン 表面処理方法及びその装置
US6429400B1 (en) 1997-12-03 2002-08-06 Matsushita Electric Works Ltd. Plasma processing apparatus and method
JP4221847B2 (ja) 1999-10-25 2009-02-12 パナソニック電工株式会社 プラズマ処理装置及びプラズマ点灯方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003041372A (ja) * 2001-08-02 2003-02-13 Konica Corp 大気圧プラズマ処理装置及び大気圧プラズマ処理方法

Also Published As

Publication number Publication date
JPH01306569A (ja) 1989-12-11

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