JPH0460122B2 - - Google Patents
Info
- Publication number
- JPH0460122B2 JPH0460122B2 JP58154749A JP15474983A JPH0460122B2 JP H0460122 B2 JPH0460122 B2 JP H0460122B2 JP 58154749 A JP58154749 A JP 58154749A JP 15474983 A JP15474983 A JP 15474983A JP H0460122 B2 JPH0460122 B2 JP H0460122B2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- gas
- vacuum chamber
- substrate
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Polymerisation Methods In General (AREA)
- Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15474983A JPS6047003A (ja) | 1983-08-26 | 1983-08-26 | プラズマ重合法及びその重合装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15474983A JPS6047003A (ja) | 1983-08-26 | 1983-08-26 | プラズマ重合法及びその重合装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6047003A JPS6047003A (ja) | 1985-03-14 |
| JPH0460122B2 true JPH0460122B2 (enExample) | 1992-09-25 |
Family
ID=15591067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15474983A Granted JPS6047003A (ja) | 1983-08-26 | 1983-08-26 | プラズマ重合法及びその重合装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6047003A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62109803A (ja) * | 1985-11-06 | 1987-05-21 | Sumitomo Electric Ind Ltd | 有機薄膜形成方法 |
| JPS6320101A (ja) * | 1986-07-15 | 1988-01-27 | Sanyo Tokushu Seiko Kk | 先端裂け防止圧延方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57182302A (en) * | 1981-05-06 | 1982-11-10 | Shuzo Hattori | Apparatus for forming polymer film by plasma polymerization |
| JPS59193904A (ja) * | 1983-04-18 | 1984-11-02 | Matsushita Electric Ind Co Ltd | 高分子薄膜形成装置 |
-
1983
- 1983-08-26 JP JP15474983A patent/JPS6047003A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6047003A (ja) | 1985-03-14 |
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