JPH0248424Y2 - - Google Patents

Info

Publication number
JPH0248424Y2
JPH0248424Y2 JP1985146077U JP14607785U JPH0248424Y2 JP H0248424 Y2 JPH0248424 Y2 JP H0248424Y2 JP 1985146077 U JP1985146077 U JP 1985146077U JP 14607785 U JP14607785 U JP 14607785U JP H0248424 Y2 JPH0248424 Y2 JP H0248424Y2
Authority
JP
Japan
Prior art keywords
wafer
support
spring body
free end
planetary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985146077U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6255557U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985146077U priority Critical patent/JPH0248424Y2/ja
Publication of JPS6255557U publication Critical patent/JPS6255557U/ja
Application granted granted Critical
Publication of JPH0248424Y2 publication Critical patent/JPH0248424Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1985146077U 1985-09-24 1985-09-24 Expired JPH0248424Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985146077U JPH0248424Y2 (en, 2012) 1985-09-24 1985-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985146077U JPH0248424Y2 (en, 2012) 1985-09-24 1985-09-24

Publications (2)

Publication Number Publication Date
JPS6255557U JPS6255557U (en, 2012) 1987-04-06
JPH0248424Y2 true JPH0248424Y2 (en, 2012) 1990-12-19

Family

ID=31058208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985146077U Expired JPH0248424Y2 (en, 2012) 1985-09-24 1985-09-24

Country Status (1)

Country Link
JP (1) JPH0248424Y2 (en, 2012)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5360381A (en) * 1976-11-11 1978-05-30 Mitsubishi Electric Corp Planetary for vacuum evaporation

Also Published As

Publication number Publication date
JPS6255557U (en, 2012) 1987-04-06

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