JPH024675B2 - - Google Patents
Info
- Publication number
- JPH024675B2 JPH024675B2 JP2061383A JP2061383A JPH024675B2 JP H024675 B2 JPH024675 B2 JP H024675B2 JP 2061383 A JP2061383 A JP 2061383A JP 2061383 A JP2061383 A JP 2061383A JP H024675 B2 JPH024675 B2 JP H024675B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cylindrical
- thin film
- metal
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 40
- 239000010409 thin film Substances 0.000 claims description 26
- 239000010408 film Substances 0.000 claims description 15
- 238000007738 vacuum evaporation Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 description 11
- 238000001704 evaporation Methods 0.000 description 9
- 230000008020 evaporation Effects 0.000 description 9
- 230000003685 thermal hair damage Effects 0.000 description 7
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000005979 thermal decomposition reaction Methods 0.000 description 4
- 230000037303 wrinkles Effects 0.000 description 4
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 239000002861 polymer material Substances 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 230000000476 thermogenic effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2061383A JPS59147023A (ja) | 1983-02-10 | 1983-02-10 | 金属薄膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2061383A JPS59147023A (ja) | 1983-02-10 | 1983-02-10 | 金属薄膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59147023A JPS59147023A (ja) | 1984-08-23 |
| JPH024675B2 true JPH024675B2 (enrdf_load_stackoverflow) | 1990-01-30 |
Family
ID=12032104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2061383A Granted JPS59147023A (ja) | 1983-02-10 | 1983-02-10 | 金属薄膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59147023A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010163693A (ja) * | 2010-04-12 | 2010-07-29 | Ulvac Japan Ltd | 巻取式真空蒸着方法 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6318064A (ja) * | 1986-07-10 | 1988-01-25 | Nippon Kokan Kk <Nkk> | 真空蒸着方法 |
| JPS6318063A (ja) * | 1986-07-10 | 1988-01-25 | Nippon Kokan Kk <Nkk> | 真空蒸着方法 |
| JP2013036104A (ja) * | 2011-08-10 | 2013-02-21 | Toray Advanced Film Co Ltd | 薄膜形成方法および薄膜形成装置 |
-
1983
- 1983-02-10 JP JP2061383A patent/JPS59147023A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010163693A (ja) * | 2010-04-12 | 2010-07-29 | Ulvac Japan Ltd | 巻取式真空蒸着方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59147023A (ja) | 1984-08-23 |
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