JPH0245702B2 - - Google Patents

Info

Publication number
JPH0245702B2
JPH0245702B2 JP56106495A JP10649581A JPH0245702B2 JP H0245702 B2 JPH0245702 B2 JP H0245702B2 JP 56106495 A JP56106495 A JP 56106495A JP 10649581 A JP10649581 A JP 10649581A JP H0245702 B2 JPH0245702 B2 JP H0245702B2
Authority
JP
Japan
Prior art keywords
vacuum
chamber
metallizing
sealing
vacuum chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56106495A
Other languages
English (en)
Japanese (ja)
Other versions
JPS589240A (ja
Inventor
Takashi Ujihara
Katsumi Hikuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DAIA SHINKU GIKEN KK
PAIONIA KK
Original Assignee
DAIA SHINKU GIKEN KK
PAIONIA KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DAIA SHINKU GIKEN KK, PAIONIA KK filed Critical DAIA SHINKU GIKEN KK
Priority to JP10649581A priority Critical patent/JPS589240A/ja
Publication of JPS589240A publication Critical patent/JPS589240A/ja
Publication of JPH0245702B2 publication Critical patent/JPH0245702B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP10649581A 1981-07-08 1981-07-08 被処理物のメタライジング方法および之を実施する装置 Granted JPS589240A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10649581A JPS589240A (ja) 1981-07-08 1981-07-08 被処理物のメタライジング方法および之を実施する装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10649581A JPS589240A (ja) 1981-07-08 1981-07-08 被処理物のメタライジング方法および之を実施する装置

Publications (2)

Publication Number Publication Date
JPS589240A JPS589240A (ja) 1983-01-19
JPH0245702B2 true JPH0245702B2 (enrdf_load_stackoverflow) 1990-10-11

Family

ID=14435017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10649581A Granted JPS589240A (ja) 1981-07-08 1981-07-08 被処理物のメタライジング方法および之を実施する装置

Country Status (1)

Country Link
JP (1) JPS589240A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59172174A (ja) * 1983-03-18 1984-09-28 Matsushita Electric Ind Co Ltd デイジタル信号記録再生デイスクの製造方法
JPH08273207A (ja) * 1995-01-31 1996-10-18 Canon Inc 光情報記録媒体搬送用キヤリア、該キヤリアを用いた光情報記録媒体の製造方法及び製造装置
WO2006077632A1 (ja) * 2005-01-19 2006-07-27 Hirata Corporation 搬送装置

Also Published As

Publication number Publication date
JPS589240A (ja) 1983-01-19

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