JPH0241164Y2 - - Google Patents
Info
- Publication number
- JPH0241164Y2 JPH0241164Y2 JP10258884U JP10258884U JPH0241164Y2 JP H0241164 Y2 JPH0241164 Y2 JP H0241164Y2 JP 10258884 U JP10258884 U JP 10258884U JP 10258884 U JP10258884 U JP 10258884U JP H0241164 Y2 JPH0241164 Y2 JP H0241164Y2
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- vacuum
- container
- vacuum container
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 24
- 238000007740 vapor deposition Methods 0.000 claims description 20
- 238000011084 recovery Methods 0.000 claims description 14
- 239000000126 substance Substances 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 239000007788 liquid Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000002826 coolant Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10258884U JPS6120557U (ja) | 1984-07-05 | 1984-07-05 | 蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10258884U JPS6120557U (ja) | 1984-07-05 | 1984-07-05 | 蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6120557U JPS6120557U (ja) | 1986-02-06 |
| JPH0241164Y2 true JPH0241164Y2 (enrdf_load_stackoverflow) | 1990-11-01 |
Family
ID=30661984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10258884U Granted JPS6120557U (ja) | 1984-07-05 | 1984-07-05 | 蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6120557U (enrdf_load_stackoverflow) |
-
1984
- 1984-07-05 JP JP10258884U patent/JPS6120557U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6120557U (ja) | 1986-02-06 |
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