JPS6120557U - 蒸着装置 - Google Patents

蒸着装置

Info

Publication number
JPS6120557U
JPS6120557U JP10258884U JP10258884U JPS6120557U JP S6120557 U JPS6120557 U JP S6120557U JP 10258884 U JP10258884 U JP 10258884U JP 10258884 U JP10258884 U JP 10258884U JP S6120557 U JPS6120557 U JP S6120557U
Authority
JP
Japan
Prior art keywords
vapor deposition
vacuum
deposition equipment
vacuum container
deposition apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10258884U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0241164Y2 (enrdf_load_stackoverflow
Inventor
正博 花井
昭 主原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10258884U priority Critical patent/JPS6120557U/ja
Publication of JPS6120557U publication Critical patent/JPS6120557U/ja
Application granted granted Critical
Publication of JPH0241164Y2 publication Critical patent/JPH0241164Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10258884U 1984-07-05 1984-07-05 蒸着装置 Granted JPS6120557U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10258884U JPS6120557U (ja) 1984-07-05 1984-07-05 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10258884U JPS6120557U (ja) 1984-07-05 1984-07-05 蒸着装置

Publications (2)

Publication Number Publication Date
JPS6120557U true JPS6120557U (ja) 1986-02-06
JPH0241164Y2 JPH0241164Y2 (enrdf_load_stackoverflow) 1990-11-01

Family

ID=30661984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10258884U Granted JPS6120557U (ja) 1984-07-05 1984-07-05 蒸着装置

Country Status (1)

Country Link
JP (1) JPS6120557U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0241164Y2 (enrdf_load_stackoverflow) 1990-11-01

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