JPS6231972Y2 - - Google Patents
Info
- Publication number
- JPS6231972Y2 JPS6231972Y2 JP1979176256U JP17625679U JPS6231972Y2 JP S6231972 Y2 JPS6231972 Y2 JP S6231972Y2 JP 1979176256 U JP1979176256 U JP 1979176256U JP 17625679 U JP17625679 U JP 17625679U JP S6231972 Y2 JPS6231972 Y2 JP S6231972Y2
- Authority
- JP
- Japan
- Prior art keywords
- container
- wafer
- back plate
- flexible
- front surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979176256U JPS6231972Y2 (enrdf_load_stackoverflow) | 1979-12-21 | 1979-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1979176256U JPS6231972Y2 (enrdf_load_stackoverflow) | 1979-12-21 | 1979-12-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5694038U JPS5694038U (enrdf_load_stackoverflow) | 1981-07-25 |
| JPS6231972Y2 true JPS6231972Y2 (enrdf_load_stackoverflow) | 1987-08-15 |
Family
ID=29686897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1979176256U Expired JPS6231972Y2 (enrdf_load_stackoverflow) | 1979-12-21 | 1979-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6231972Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0727765B2 (ja) * | 1985-11-11 | 1995-03-29 | 日新電機株式会社 | ウエハ−保持装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5027898U (enrdf_load_stackoverflow) * | 1973-07-06 | 1975-03-31 | ||
| JPS5841722Y2 (ja) * | 1977-12-05 | 1983-09-20 | 日本真空技術株式会社 | イオン打込用のバックプレ−ト装置 |
-
1979
- 1979-12-21 JP JP1979176256U patent/JPS6231972Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5694038U (enrdf_load_stackoverflow) | 1981-07-25 |
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