JPH0238925Y2 - - Google Patents

Info

Publication number
JPH0238925Y2
JPH0238925Y2 JP3241184U JP3241184U JPH0238925Y2 JP H0238925 Y2 JPH0238925 Y2 JP H0238925Y2 JP 3241184 U JP3241184 U JP 3241184U JP 3241184 U JP3241184 U JP 3241184U JP H0238925 Y2 JPH0238925 Y2 JP H0238925Y2
Authority
JP
Japan
Prior art keywords
vapor
deposited metal
filament
vapor deposition
electron impact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3241184U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60143770U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3241184U priority Critical patent/JPS60143770U/ja
Publication of JPS60143770U publication Critical patent/JPS60143770U/ja
Application granted granted Critical
Publication of JPH0238925Y2 publication Critical patent/JPH0238925Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3241184U 1984-03-07 1984-03-07 電子衝撃型蒸着装置 Granted JPS60143770U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3241184U JPS60143770U (ja) 1984-03-07 1984-03-07 電子衝撃型蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3241184U JPS60143770U (ja) 1984-03-07 1984-03-07 電子衝撃型蒸着装置

Publications (2)

Publication Number Publication Date
JPS60143770U JPS60143770U (ja) 1985-09-24
JPH0238925Y2 true JPH0238925Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-10-19

Family

ID=30533899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3241184U Granted JPS60143770U (ja) 1984-03-07 1984-03-07 電子衝撃型蒸着装置

Country Status (1)

Country Link
JP (1) JPS60143770U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS60143770U (ja) 1985-09-24

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