JPH0238567A - Planetary rotary jig for vacuum vapor deposition apparatus - Google Patents

Abstract

PURPOSE:To form vapor-deposited films of uniform thickness on all substrates by allowing substrate holders to which substrates are attached, respectively, to perform rotational motions on their own axes and also revolutional motions with respect to a vapor deposition source by means of a planetary rotary jig with a specific structure at the time of vapor-depositing thin films onto many substrates, respectively, in a vacuum tank. CONSTITUTION:A vapor deposition source 13 fitted with an electron gun 10 is provided to the bottom 2b of a vacuum tank 2, and a planetary rotary mechanism 9 fitted with a rotating shaft 6 and an annular frame 8 is provided to the top 2a. A planetary rotary jig 25 is constituted of radiately provided plural circular-arched guide plates 26 in which respective one ends are fixed to the annular frame 8 and respective other ends are connected in the central parts by means of a joint plate 26a, angle adjustment arms 28 combinedly provided in a manner capable of turning upward and downward by means of circular-arched guide holes 27 provided in the above plates 26, and, via expansion means 29, bearings 30, rotational shafts for the bearings 30, and substrate holders 32 fixed to the shafts. While rotating the rotational shafts by means of rollers 33 and annular rails 35, respectively, the annular frame 8 is revolved along the circular-arched holes 27, by which the substrate holders 32 are subjected to planetary rotation and uniform vapor-deposited films can be formed on all the substrates.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention is utilized in the technical field of film forming equipment, and particularly relates to a planetary rotation jig for a vacuum evaporation apparatus.

(Prior art) When performing vacuum deposition on a substrate such as glass, in order to form a thin film with an even thickness, a planetary rotating jig is used to rotate the substrate while revolving around a deposition source such as an electron gun. is applied.

This planetary rotation jig usually consists of a substrate holder that removably holds a large number of substrates, a holder shaft fixed at the center of the substrate holder with one end protruding, and a holder shaft fixed to the protruding end of the holder shaft. A roller, an annular rail provided along the body of the vacuum chamber for rolling the roller, a tilting arm with a bearing that pivotally supports the intermediate portion of the holder shaft, and suspending the tilting arm. and an angle adjustment means consisting of an inverted arm for hanging support.

On the other hand, in the center of the top of the vacuum chamber, the bases of a plurality of radially arranged swing arms are pivotally supported, and the inverted arms of angle adjustment means are connected to the tips of the arms, respectively, and the substrate holder is The relative angle to the vapor deposition source can be adjusted by the angle adjustment means.

(Problem to be Solved by the Invention) However, in the above-mentioned conventional planetary rotating jig, each time the angle is adjusted by the angle adjusting means, the lateral part of the inverted arm is moved in the length direction of the rotating arm. adjustment and
It is necessary to perform two adjustments: the adjustment of tilting the tilting arm with a bearing relative to the vertical part of the inverted arm;
The more you try to make the substrate holder directly face the deposition source, the more the rollers will rise from the annular rail, making it difficult for the substrate held by the substrate holder to rotate relative to the deposition source. At the same time, as the number of planetary rotating jigs increases, this tendency becomes more noticeable.

In addition, the boards are arranged on the pitch circle of the board holder, and when flipping the board toward the center of the pitch circle, the inefficient work of removing the holding frame of each board and flipping it over one by one is performed. ing.

In view of the above two conventional problems, the present invention enables the substrate holder to set the angle by adjusting only one part of the angle adjustment means that pivots the substrate holder, and also allows the angle to be set on the pitch circle of the substrate holder. The purpose of each of the arranged substrates is to provide a planetary rotation jig for a vacuum evaporation apparatus that can be turned over at the same time.

(Means for Solving the Problems) A planetary rotation jig for a vacuum evaporation apparatus of the present invention has one end fixed to an annular frame suspended and supported on the top of a vacuum chamber, and the other end fixed to the annular frame suspended from the top of the vacuum chamber. a guide plate connected to each other at the center position and arranged radially; an angle adjustment arm connected vertically and vertically along an arcuate guide hole bored in each guide plate; and an extendable means for the angle adjustment arm. a bearing body that is connected to the bearing body, a rotating shaft that is pivotally supported by the bearing body, a substrate holder that is fixed to the inner end of the tank of the rotating shaft, and a roller that is fixed to the outer end of the tank. , and an annular rail fixed to a vacuum chamber on which the roller can be mounted in a rolling manner, and the substrate holder has a large number of substrates arranged on a pitch circle of the substrate holder. , which can be simultaneously reversed by interlocking joints provided between the respective boards.

(Function) The effect of the above means is that the relative angle of the substrate holder with respect to the evaporation source can be adjusted along an arc centered at the point of contact where the roller that rotates integrally with the substrate holder rides on the annular rail. In addition, when a plurality of substrates placed in a substrate holder are inverted, each of the other substrates is simultaneously inverted when one substrate is inverted by an interlocking joint.

(Example) Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

The vacuum evaporation apparatus M1 shown in FIGS.
, a vacuum pump mechanism 3, a control panel 4, and an electron gun power source 5. The vacuum chamber 2 is provided with a planetary rotation mechanism 9 consisting of a rotating shaft 6, a rotating shaft driving means 7, and an annular frame 8 suspended and supported on the top portion 2a, and a planetary rotating mechanism 9 is provided on the bottom portion 2a.
An evaporation source 13 consisting of an electron gun 10, a crucible rotation mechanism 11, and a shank mechanism 12 is provided in b, and halogen heaters 14, 14, . . . are arranged at appropriate intervals in the body 2C. It is set up.

The vacuum pump mechanism 3 includes a talio pump 15, a main valve 16, a cryo regeneration valve 17, a roughing pump set 18, and a roughing valve 19. 20.20
2 is a viewing window, 21 is an adhesion prevention plate, and 22 is a baking heater plate.

Further, a planetary rotating jig 25 of the present invention is provided at an upper position inside the vacuum chamber 2.

The planetary rotating jig 25 includes a plurality of circular arc-shaped jigs, one end of which is fixed to the annular frame 8 and the other end of which is connected to each other by a joint plate 26a at the center of the vacuum chamber 2 and arranged radially. (for example 6) guide plates 26.26...
・An angle adjustment arm 28, 28, which is vertically and vertically connected along the arcuate guide hole 27 drilled in each guide plate.
・Bearing bodies 30, 30... connected to the degree adjustment arm via the telescopic means 29, rotation shafts 31, 31... pivotally supported by the respective bearing bodies, and the respective Substrate holders 32, 32... fixed to the inner end of the tank of the rotating shaft and rollers 33, 33... fixed to the outer end of the tank, and the rollers are mounted so that they can roll. It consists of an annular rail 35 fixed to the body 2C of the vacuum chamber 2 via a plurality of brackets 34 and 34.

As shown in the fifth and FIG.
, 36a with a spacer 37 interposed between the bolts 3
8 and each lateral portion 36b.

36b are brought into contact with both sides of the guide plate 26 and fixed by adjustment poles 1-37.37.

The expansion/contraction means 29 is for finely adjusting the height of the roller 33 with respect to the annular rail 35.
8 and a long hole 42 of the mounting member 41 of the bearing body 30, which will be described later.
42.

The bearing body 30 consists of a bearing box 40 containing a ball bearing 39.39 and a mounting member 41, and the mounting member 41 is provided with a longitudinal elongated hole 42.42.

The substrate holder 32 has a pitch circle P1.
On P2, a large number of substrates W are removably attached to the substrate frame 43 and arranged at equal intervals, and each of the substrates W, W
. . . An interlocking joint 44 (see FIG. 8) is provided between them.

The roller 33 has a sharp outer peripheral portion. Guide groove 35 of the annular rail 35 on which the roller 33 is mounted
In a, the set angle θ of the substrate boulder 32 is between 30° (dashed line in Figure 5) and 90° (solid line in Figure 5) with respect to the horizontal direction.
The arcuate guide hole 27 of the guide plate 26 is formed so that the roller 33 can be mounted in point contact within a range of It is formed with a radius of

As shown in FIGS. 8 to 11, the interlocking joint 44 includes a bearing member 45 fixed to the substrate holder 32, a rotation shaft 46 having a small diameter portion /16a pivoted on the bearing member 45,
Each time the rotating shaft 46 rotates 80° by pressing against the cam surface 47 formed on the large diameter portion 46b of the rotating shaft 46, the rotating shaft 4
6, a cover plate 49 to prevent the small diameter portion 46a of the rotating shaft 46 from floating, and fork portions 46c, 46C formed at both ends of the rotating shaft 46.
The connecting pins 50 and 50 are provided on the outer periphery of the board frame 43 to engage with the board frame 43.

The tip of the fork portion 46c is formed into a substantially spherical shape so as not to interfere with the engagement groove 43a of the board frame 43.

When a large number of substrates WW... placed on the substrate holder 32 are reversed by any one of the substrates W8 by appropriate means,
This reversal operation is transmitted to each of the other boards W, W, etc. by the cross axis function of the connecting pin 50, 50 and the rotation shaft 46, and all the boards W, W arranged in the pitch circle PI (P2)
. . . are configured to be inverted at the same time.

Next, the operation of the above embodiment will be explained.

In FIG. 3, when the annular frame 8 rotates due to activation of the rotary shaft driving means 7, the substrate holder 32, which is connected to the annular frame 8 via the guide plate 26, the angle adjustment arm 28, and the bearing body 30, rotates. , revolves around the evaporation source 13 and rotates on its own axis by the roller 33 mounted on the annular rail 35, forming a uniform thin film on the substrates W held by the substrate holder 32. be done.

If you want to set the substrate holder 32 at a desired angle with respect to the deposition source 13, as shown in FIG.
8 to the set angle θ, then adjust again) 37
．． Fix it at 37.

Note that when the number of substrate holders 32 and rollers 33 is increased to three or more, the outer periphery of the additional rollers 33 is brought into close contact with the guide groove 35a of the annular rail 35 by fine adjustment by the expansion/contraction mechanism 29.

Moreover, when reversing each substrate W, W, etc. arranged in each substrate holder 32, 32, etc., each of the other substrates W, W, Interlocking joint 44
．． 4'4... are simultaneously inverted.

(Effects of the Invention) With the above configuration, the present invention allows the relative angle of the substrate holder to the evaporation source to be set along an arc centered on the contact point of the outer circumference of the roller mounted on the annular rail, and at an angle with respect to the guide plate. Settings can be made by adjusting only the connection part with the adjustment arm, and the rollers do not move away from the annular rail even if each substrate holder is set at a different angle, so the substrate holders can rotate normally. Not only does work efficiency and equipment functionality improve, but multiple boards placed in the board holder can be flipped simultaneously using interlocking joints, which greatly reduces work time.
By introducing appropriate reversing means in the substrate holder,
An excellent advantage is that the substrate can be inverted while maintaining a vacuum.

[Brief explanation of the drawing]

The drawings illustrate embodiments of the present invention, and FIG. 1 is a front view of the vacuum evaporation apparatus, FIG. 2 is a left side view of the same, and FIG.
Figure 4 is a cross-sectional view taken along line -■, Figure 4 is a cross-sectional view taken along line TV-IV, Figure 5 is a front view of the planetary rotating jig, Figure 6 is a right side view of the angle adjustment arm, etc. A front view of the board holder, FIG. 8 is an enlarged view of the part ■ in FIG. 7,
FIG. 9 is a partially sectional front view of the interlocking joint, FIG. 10 is a right side view thereof, and FIG. 11 is an exploded external perspective view of the interlocking joint. 1...Vacuum deposition device 2a...Top part 25...Planetary rotation jig 26...Guide flat panel 2B...Angle adjustment arm 30...Bearing body 32...Basic potato strip holder 35... - Annular rail W... Board Pl 2... Vacuum chamber 8... Annular frame 27... Arc-shaped guide hole 29... Expanding/contracting means 31... Rotating shaft 33... Roller 44... Interlocking Joint P2...pitch circle

Claims (1)

[Scope of Claims] 1) Guides having one end fixed to an annular frame suspended and supported on the top of the vacuum chamber, and the other ends of which are connected to each other at the center of the vacuum chamber and arranged radially. a plate, an angle adjustment arm connected in a vertically movable manner along an arcuate guide hole drilled in each guide plate, a bearing body connected to the angle adjustment arm via a telescoping means, and the bearing body. a substrate holder fixed to the inner end of the tank, a roller fixed to the outer end of the tank, and a vacuum in order to allow the roller to roll. A planetary rotation jig for a vacuum evaporation apparatus, characterized by comprising an annular rail fixed to a tank. 2) Planetary rotation of the vacuum evaporation apparatus according to claim 1, wherein the substrate holder is configured such that a large number of substrates arranged on a pitch circle of the substrate holder can be simultaneously reversed by an interlocking joint provided between the substrates. jig.