CN216738504U

CN216738504U - Multi-workpiece-disc film coating device

Info

Publication number: CN216738504U
Application number: CN202220308272.8U
Authority: CN
Inventors: 刘亮; 魏国军; 肖畅
Original assignee: Buhler Leybold Optics Equipment Beijing Co ltd
Current assignee: Buhler Leybold Optics Equipment Beijing Co ltd
Priority date: 2022-02-16
Filing date: 2022-02-16
Publication date: 2022-06-14
Anticipated expiration: 2032-02-16

Abstract

The utility model discloses a multi-workpiece-disc coating device, which comprises: the evaporation source device comprises a rotary driving mechanism, a vacuum chamber, a rotating shaft, a plurality of rotary assemblies and a plurality of evaporation source groups, wherein the rotary driving mechanism is arranged at the top of the vacuum chamber, and the rotating shaft is arranged inside the vacuum chamber and connected with the rotary driving mechanism; the plurality of rotating assemblies sequentially penetrate through the rotating shaft and are arranged on the rotating shaft at intervals, and each rotating assembly comprises a workpiece rack and a workpiece disc arranged on the workpiece rack; the plurality of evaporation source groups are arranged on the side part of the vacuum chamber and used for spraying film materials to the upper surface and the lower surface of the workpiece on the workpiece disc simultaneously in the film coating process. The utility model can simultaneously place more than two workpiece disks, and the two sides of the substrate are coated with films at one time, thereby greatly improving the output of a single furnace.

Description

Multi-workpiece-disc film coating device

Technical Field

The utility model relates to the technical field of coating equipment, in particular to a multi-workpiece-disc coating device.

Background

For the coating process of a circular substrate, a coating apparatus currently used is shown in fig. 1a and 1b, and includes: a rotation driving mechanism 101, a vacuum chamber 102, a rotation shaft 103, a work holder 104, a work tray 105, and a lower evaporation source 106. In the coating process, the substrate is placed on the workpiece disc and rotates along with the rotating shaft under the driving of the rotary driving mechanism, the coating material of the lower evaporation source is coated on the lower surface of the substrate, the lower surface of the substrate is coated, the substrate needs to be turned over manually, and then the upper surface of the substrate is coated, so that the coating process can be completed only by two coating furnaces, and the efficiency is low.

Another coating apparatus currently in use can be seen in fig. 2a and 2b, which is substantially the same as the apparatus shown in fig. 1a and 1b, except that an upper evaporation source 107 is provided at the top of the vacuum chamber. In the coating process of the device, a substrate is placed on a workpiece disc and driven by a rotary driving mechanism to rotate along with a rotating shaft, a film material of a lower evaporation source is coated on the lower surface of the substrate, and a film material of an upper evaporation source is coated on the upper surface of the substrate, so that the coating process can be completed by one coating furnace, but the efficiency is still lower because only one workpiece disc is provided.

Disclosure of Invention

In order to solve at least one of the problems of the prior art, the technical solution provided by the present application includes:

the embodiment of the application provides a multistation dish coating film device, includes: the evaporation source device comprises a rotary driving mechanism, a vacuum chamber, a rotating shaft, a plurality of rotary assemblies and a plurality of evaporation source groups, wherein the rotary driving mechanism is arranged at the top of the vacuum chamber, and the rotating shaft is arranged inside the vacuum chamber and connected with the rotary driving mechanism; the plurality of rotating assemblies sequentially penetrate through the rotating shaft and are arranged on the rotating shaft at intervals, and each rotating assembly comprises a workpiece rack and a workpiece disc arranged on the workpiece rack; the plurality of evaporation source groups are arranged on the side part of the vacuum chamber and used for spraying film materials to the upper surface and the lower surface of the workpiece on the workpiece disc simultaneously in the film coating process.

The technical effects that this application can realize include at least: the coating device is provided with the plurality of workpiece discs and the plurality of evaporation sources, when the workpieces are coated with films, the workpieces are arranged on the workpiece discs, all the workpiece discs are driven by the rotary driving mechanism to synchronously rotate along with the rotating shaft, the film materials are sprayed by the plurality of groups of evaporation sources simultaneously, the upper surface and the lower surface of each workpiece disc can be coated with the film materials, the two surfaces of the workpieces arranged on the workpiece discs can be coated at one time, the coating quality and the coating efficiency can be improved, and the yield of a single furnace can be improved.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

FIG. 1a and FIG. 1b are schematic structural views of a conventional coating apparatus;

FIGS. 2a and 2b are schematic structural views of another conventional coating device;

fig. 3 to 4 are schematic structural views of a coating apparatus according to an embodiment of the present invention;

fig. 5 to 6 are schematic structural views of a coating apparatus according to another embodiment of the present invention;

FIG. 7 is a schematic view of a vertical evaporation source group and a horizontal evaporation source group of the coating apparatus shown in FIGS. 5 and 6;

fig. 8 is a schematic structural diagram of an evaporation source according to the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Fig. 3 to 4 are schematic structural views of a coating apparatus according to an embodiment of the present invention; fig. 5 to 6 are schematic structural views of a coating apparatus according to another embodiment of the present invention; FIG. 7 is a schematic view of a vertical evaporation source group and a horizontal evaporation source group of the coating apparatus shown in FIGS. 5 and 6; fig. 8 is a schematic structural diagram of an evaporation source according to the present invention.

(example 1)

As shown in fig. 3 to 4, a multi-workpiece plate coating apparatus according to an embodiment of the present disclosure may include: a rotary driving mechanism 1, a vacuum chamber 2, a rotary shaft 3, a plurality of rotary components and a plurality of evaporation source groups.

Wherein the rotation driving mechanism 1 can be disposed on the top of the vacuum chamber 2. The rotary drive mechanism 1 may be of an existing construction and may, for example, include a drive motor and a rotary drum. The rotary drum is connected with a driving shaft of a driving motor. The rotating shaft 3 is arranged inside the vacuum chamber 2, the lower end of the rotating shaft 3 can be rotatably connected with the bottom of the vacuum chamber 2, and the upper end of the rotating shaft 3 is connected with the rotary driving mechanism 1.

In the present embodiment, a plurality of rotating assemblies sequentially pass through the rotating shaft 3 and are arranged on the rotating shaft 3 at intervals, each rotating assembly comprises a workpiece holder 4 and a workpiece tray 5 arranged on the workpiece holder, and the rotating assemblies rotate along with the rotation of the rotating shaft. In an exemplary embodiment, the workpiece holder 4 may be a umbrella-shaped structure, the workpiece tray 5 may also be a matching umbrella-shaped structure, and a plurality of workpiece mounting holes, such as circular workpiece mounting holes, are arranged on the workpiece tray 5 in a set order for mounting circular workpieces. In the present embodiment, the workpiece is a substrate.

The plurality of evaporation source groups are arranged at the side part of the vacuum chamber 2 and are used for spraying coating materials to the upper surface and the lower surface of the workpiece on the workpiece disc 5 simultaneously in the coating process.

Further, in the present embodiment, the vacuum evaporation system may include M rotating assemblies and M +1 evaporation source groups spaced along the axial direction of the vacuum chamber, each evaporation source group includes at least two evaporation sources, and M ≧ 2. The M +1 evaporation source groups are arranged so that there are a plurality of evaporation source groups above and below each workpiece tray 5. In one exemplary embodiment, M-3. As shown in fig. 3 and 4. The 4 evaporation source groups may be disposed at a side portion of the vacuum chamber 2, for example, a right side in the illustrated direction, by vertical electrode rods 6, and the evaporation source groups are disposed above and below each of the workpiece disks. Each evaporation source group may include 2 evaporation sources 7. Preferably, each evaporation source is movably arranged on the vertical electrode rod 6, so that the position of each evaporation source on the electrode rod can be adjusted, the uniformity of the substrate film layer on the workpiece disc 5 is ensured, and the film coating quality is improved. Those skilled in the art will appreciate that the evaporation source can be driven by the existing driving mechanism to move along the vertical direction of the vertical electrode rod. In the present embodiment, as shown in fig. 8, each evaporation source 7 may include a square-shaped film cartridge 10 and support rods 11 extending along both sides of the film cartridge. The support rod 11 is used for connecting with the vertical electrode rod 6. The bottom of the film material box is closed, a plurality of injection holes are formed on the top and the side part of the film material box, a plurality of injection holes are formed on the side part of the film material box opposite to the workpiece disc, and the injection holes can be round holes. Therefore, the evaporation angle is increased as much as possible while the film material is prevented from falling from the bottom surface.

The working principle of the multi-workpiece-disc coating device provided by the embodiment is as follows: when a workpiece needs to be coated, the workpiece is arranged on the workpiece discs, and all the workpiece discs are driven by the rotary driving mechanism to synchronously rotate along with the rotary shaft. In the coating process, all evaporation sources work simultaneously, and the two surfaces of the workpiece arranged on the workpiece disc can be coated at one time. Meanwhile, the position of each evaporation source on the electrode rod can be adjusted, so that the uniformity of a substrate film layer on the workpiece disc is ensured, and the film coating quality is improved.

(example 2)

Another embodiment of the present application provides a multi-workpiece-disk coating apparatus, which is substantially the same as the foregoing embodiments, except for the structure of the evaporation source set. Specifically, as shown in fig. 5 and 6, the coating apparatus provided in the present embodiment includes M vertical evaporation source groups 7 and M +1 horizontal evaporation source groups 8, each evaporation source group including at least two evaporation sources. The M vertical evaporation source groups are arranged at intervals along the axial direction of the vacuum chamber 2, the M +1 horizontal evaporation source groups are arranged at intervals along the axial direction of the vacuum chamber 2, the evaporation source of each horizontal evaporation group is arranged at intervals along the radial direction of the vacuum chamber 2, each vertical evaporation source group is arranged between two adjacent horizontal evaporation source groups, each rotating assembly is arranged between two adjacent horizontal evaporation source groups, and M is more than or equal to 2, so that a plurality of groups of evaporation sources are arranged above and below each workpiece disc 5, all the evaporation sources work simultaneously in the film coating process, and the two sides of a substrate arranged on the workpiece disc 5 can be coated at one time. Preferably, M ═ 3.

Further, the vertical evaporation source group is arranged on the vertical electrode rod 6, each horizontal evaporation source group 8 is arranged on the horizontal electrode rod 9, and the M +1 horizontal electrode rods 9 are arranged in parallel along the axial direction and are connected with the vertical electrode rod 6. As shown in fig. 7, each vertical evaporation source group may include two evaporation sources disposed at intervals, and each horizontal evaporation source group may include three evaporation sources disposed at intervals.

In this embodiment, the horizontal evaporation source set is movably disposed on the horizontal electrode rod, and the vertical evaporation source set is movably disposed at a position on the vertical electrode rod, that is, a position of each evaporation source on the electrode rod can be adjusted, so that a uniform substrate film layer on the workpiece tray 5 can be ensured, and the film coating quality can be improved. The structure of each evaporation source is the same as the foregoing embodiment.

Compared with the foregoing embodiments, the multi-workpiece coating device provided in this embodiment can make the coating more uniform due to the addition of the plurality of horizontal evaporation source sets.

The above description is only exemplary of the present application and should not be taken as limiting the present application, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A multi-workpiece-disk coating device is characterized by comprising: the evaporation source group comprises a rotary driving mechanism, a vacuum chamber, a rotating shaft, a plurality of rotating assemblies and a plurality of evaporation source groups, wherein the rotary driving mechanism is arranged at the top of the vacuum chamber, and the rotating shaft is arranged inside the vacuum chamber and connected with the rotary driving mechanism; the plurality of rotating assemblies sequentially penetrate through the rotating shaft and are arranged on the rotating shaft at intervals, and each rotating assembly comprises a workpiece rack and a workpiece disc arranged on the workpiece rack; the plurality of evaporation source groups are arranged on the side part of the vacuum chamber and used for spraying film materials to the upper surface and the lower surface of the workpiece on the workpiece disc simultaneously in the film coating process.

2. The multi-workpiece-disk coating device according to claim 1, comprising M rotating assemblies and M +1 evaporation source groups spaced along the axial direction of the vacuum chamber, each evaporation source group comprising at least two evaporation sources, M ≧ 2.

3. The multi-workpiece tray coating apparatus according to claim 2, wherein the M +1 evaporation source groups are disposed at the side of the vacuum chamber by vertical electrode rods.

4. The multi-workpiece tray coating apparatus according to claim 3, wherein the M +1 evaporation source groups are movably disposed on the vertical electrode rods.

5. The multi-workpiece disk coating apparatus according to claim 1, comprising M rotating assemblies, M vertical evaporation source groups, and M +1 horizontal evaporation source groups, each evaporation source group comprising at least two evaporation sources, the M vertical evaporation source groups being spaced apart in an axial direction of the vacuum chamber, the M +1 horizontal evaporation source groups being spaced apart in the axial direction of the vacuum chamber and the evaporation sources of each horizontal evaporation group being spaced apart in a radial direction of the vacuum chamber, each vertical evaporation source group being disposed between two adjacent horizontal evaporation source groups, each rotating assembly being disposed between two adjacent horizontal evaporation source groups, M ≧ 2.

6. The multi-workpiece disk coating device according to claim 5, wherein the vertical evaporation source groups are arranged on vertical electrode rods, each horizontal evaporation source group is arranged on a horizontal electrode rod, and M +1 horizontal electrode rods are arranged in parallel along the axial direction and are connected with the vertical electrode rods.

7. The multi-workpiece-tray coating apparatus according to claim 6, wherein each evaporation source is movably disposed on the corresponding electrode rod.

8. The multi-workpiece tray coating apparatus according to any one of claims 2 to 7, wherein each evaporation source comprises a square film magazine and support rods extending along both sides of the film magazine, the support rods being adapted to be connected to the electrode rods.

9. The multi-workpiece tray coating apparatus according to claim 8, wherein the film magazine is closed at the bottom, and is formed with a plurality of spray holes at the top and side portions.

10. The multi-workpiece-tray coating apparatus according to claim 9, wherein the film magazine is formed with a plurality of injection holes on a side facing the workpiece tray.