CN208136324U - A kind of vacuum coater - Google Patents
A kind of vacuum coater Download PDFInfo
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- CN208136324U CN208136324U CN201820659339.6U CN201820659339U CN208136324U CN 208136324 U CN208136324 U CN 208136324U CN 201820659339 U CN201820659339 U CN 201820659339U CN 208136324 U CN208136324 U CN 208136324U
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- clamping device
- workpiece clamping
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Abstract
The utility model discloses a kind of vacuum coaters, including vacuum cavity, the target and Workpiece clamping device that are connected with power supply.Target and Workpiece clamping device are installed in vacuum cavity, and any or both in target and Workpiece clamping device is connected by linkage mechanism with vacuum cavity side wall；Linkage mechanism and target or Workpiece clamping device connecting pin are equipped with the rotating mechanism for rotating target or linkage mechanism.It is any or both in target and Workpiece clamping device in the utility model to be connected with linkage mechanism, can linkage mechanism being rotated by with it is mobile, so that complex part surface or surface of internal cavity is uniformly received the atom or molecule of target as sputter, is plated to uniform film on surface.Linkage mechanism is equipped with rotating mechanism with the connecting pin of target or Workpiece clamping device and is connected with target or Workpiece clamping device, and linkage mechanism combination rotating mechanism makes the rotation of target or Workpiece clamping device with more flexibility.
Description
Technical field
The utility model belongs to coating technique field, in particular to a kind of vacuum coater.
Background technique
Vacuum coating refers under vacuum conditions, using low-voltage, the arc-discharge technique of high current, utilizes gas discharge
Evaporate target and make to be evaporated substance and gas all ionizes, using the acceleration of electric field, make to be evaporated substance and its
Reaction product is deposited on workpiece, also referred to as physical vapour deposition (PVD)（PVD）.At present vacuum coating technology mainly have evaporation coating,
Sputter coating and ion plating these three methods.
Vacuum coating equipment mainly uses columnar cavity in the prior art, and target is erect among cavity, is powered and
Discharge electronics.Product to be coated is fixed on surrounding them in the form of hanger, by be coated facing towards electrode.The above structure exists
After cavity vacuumizes rear filling with inert gas, by electrode discharge, the one side of product to be coated towards electrode can receive electronics
Complete the deposition of plated film.Such filming equipment is larger to the limitation of coated product structure, to plating with complex shape
When film product carries out plated film, be easy to produce plated film unevenness situation or can not dead angle position to complicated shape coated product
Carry out plated film.
The utility model patent that existing number of patent application is 201720442647.9《A kind of easy PVD vacuum coating dress
It sets》, swivel joint, which turns round the mounting plate for having sample in plated film, comes to carry out plated film, the peace that will have sample after the completion of plated film
Loading board revolution past, device are simple, easy to use.When carrying out plated film to complex-shaped workpiece to be plated, above-mentioned device
Plated film can not be carried out to the inner cavity of complex part, it is also or uneven to the film of the surface plating of complex-shaped workpieces out-of-flatness.
Having number of patent application again is 200910309766.7 patent of invention《Vacuum coater》, workpiece to be plated is in arc
Ceaselessly rotation carries out plated film on shape track, and the film of surface plating is uniform.Similarly, it is carried out to complex-shaped workpiece to be plated
When plated film, plated film can not be carried out to the inner cavity of complex part, the film of the surface plating also or to complex-shaped workpieces out-of-flatness
Unevenly.
Summary of the invention
In order to solve the deficiencies in the prior art, the utility model provides a kind of vacuum coater, target and work
Any or both in part clamping device is connected with linkage mechanism, and linkage mechanism can drive on target or Workpiece clamping device
Workpiece rotation and movement to be plated.Target can the driving of linkage mechanism be moved to complex part surface of internal cavity or outer surface into
Row sputtering makes the deposition that complex part inner cavity or outer surface receive atom or molecule completes plated film.Similarly, work as Workpiece clamping
When device is connected with linkage mechanism, the workpiece to be plated on Workpiece clamping device can be made to rotate and revolve under the driving of linkage mechanism
Turn that its surface of internal cavity or outer surface is made uniformly to receive atom or molecule, so that the film thickness of film-coating workpiece plating is uniform.
The utility model technical effect to be achieved is realized by following scheme：
A kind of vacuum coater, including vacuum cavity, the target and Workpiece clamping device that are connected with power supply.
The target and the Workpiece clamping device are installed in vacuum cavity, and in the target and Workpiece clamping device
Any or both be connected by linkage mechanism with vacuum cavity side wall；
The linkage mechanism and the target or the Workpiece clamping device connecting pin, which are equipped with, makes the target or described
The rotating mechanism of motivation structure rotation.
Linkage mechanism is connected with target, and control target realizes multi-angle rotary, thus target can control to go deep into work to be plated
Perhaps complex-shaped outer surface of workpiece rotatable sputtering atom or molecule make surface of internal cavity or complex-shaped to part surface of internal cavity
Outer surface of workpiece can be also exposed in plated film atmosphere, to obtain uniform plated film.Similarly, linkage mechanism and Workpiece clamping
Device is connected, and controls workpiece to be plated fixed on Workpiece clamping device and realizes multi-angle rotary, thus target can control to go deep into
Perhaps complex-shaped outer surface of workpiece rotatable sputtering atom or molecule make surface of internal cavity or complex-shaped inside inner-cavity part
Outer surface of workpiece can be also exposed in plated film atmosphere, to obtain uniform plated film.
Linkage mechanism and target or Workpiece clamping device connecting pin are equipped with the rotating mechanism for rotating target or linkage mechanism.
Linkage mechanism can originally drive coupled target or Workpiece clamping device rotation and movement, make target in conjunction with rotating mechanism
The rotation of material or Workpiece clamping device has more flexibility.
Further, the linkage mechanism is triaxial connecting system, four-axle linked mechanism, five-axle linkage mechanism, six axis connection
One of motivation structure or other multi-axes synchronous mechanisms.
Further, the target and the Workpiece clamping device are divided into vacuum cavity two sides.
Further, it is the target in vacuum cavity that the linkage mechanism of the target, which drives the range of the target,
With the 1/3-4/5 of two side lengths where the Workpiece clamping device.
Further, it is in vacuum cavity that the linkage mechanism of the Workpiece clamping device, which drives the range of the target,
The 1/3-4/5 of two side lengths where the target and the Workpiece clamping device.
Further, the rotating mechanism includes rocking bar, connecting rod, connecting rod and motor.
Further, the intracorporal target quantity of the vacuum chamber is 1-8.
Further, the Workpiece clamping device is fixture or fixture group.
Further, the fixture quantity of the fixture group is 2-8.
Further, the Workpiece clamping device is hanger or hanger group, and the hanger quantity of the hanger group is 2-8
It is a.
The utility model has the following advantages that：
It is any or both in target and Workpiece clamping device in the utility model to be connected with linkage mechanism, it can be in gear
Be rotated by and the movement of structure, make complex part surface or surface of internal cavity uniformly receive the atom or molecule of target as sputter,
Uniform film is plated on surface.The connecting pin of linkage mechanism and target or Workpiece clamping device is equipped with rotating mechanism and target or work
Part clamping device is connected, and linkage mechanism combination rotating mechanism makes the rotation of target or Workpiece clamping device with more flexibility.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of vacuum coater in the utility model；
Fig. 2 is the structural schematic diagram of another vacuum coater in the utility model；
Fig. 3 is the structural schematic diagram of another vacuum coater in the utility model；
Fig. 4 is the structural schematic diagram of another vacuum coater in the utility model；
Fig. 5 is the structural schematic diagram of another vacuum coater in the utility model；
Fig. 6 is the structural schematic diagram of another vacuum coater in the utility model；
Accompanying drawings symbol description：1, vacuum cavity；2, target；3, Workpiece clamping device；4, linkage mechanism；41, rotating mechanism；
100, workpiece to be plated.
Specific embodiment
The present invention will be described in detail with reference to the accompanying drawings and examples.
In the present embodiment as shown in figures 1-6, vacuum coater includes vacuum cavity 1, the target being connected with power supply 2
And Workpiece clamping device 3.Target 2 and Workpiece clamping device 3 are divided into 1 two sides of vacuum cavity, target 2 and Workpiece clamping device
Any or both in 3 is connected by linkage mechanism 4 with 1 side wall of vacuum cavity.Both there are three types of scheme, scheme one is target 2
It is connected by linkage mechanism 4 with 1 side wall of vacuum cavity, Workpiece clamping device 3 is directly connected with 1 side wall of vacuum cavity, by linking
Mechanism 4 drives the rotation of target 2 and movement, sputters at target 2 equably on 100 surface of workpiece to be plated, is plated to uniform film, and
Linkage mechanism 4 can drive target 2 to go deep into 100 inner cavity of workpiece to be plated and be sputtered, and plate 100 inner cavity of workpiece to be plated equally can
Even film；Scheme two is that target 2 is directly connected with 1 side wall of vacuum cavity, and Workpiece clamping device 3 passes through linkage mechanism 4 and vacuum
1 side wall of cavity is connected, and drives the rotation of workpiece to be plated 100 and movement on Workpiece clamping device 3 by linkage mechanism 4, makes work to be plated
The surface to be plated of part 100 can receive the atom of the sputtering of target 2 or molecule is plated to film in homogeneous thickness；Scheme three is target 2
It is connected by linkage mechanism 4 with 1 side wall of vacuum cavity with Workpiece clamping device 3, under the driving of linkage mechanism 4,2 He of target
The rotation of Workpiece clamping device 3 and movement, the atom or molecule for sputtering target 2 are uniformly attached to 100 surface of workpiece to be plated, complete
The deposition of plated film.Target 2 or Workpiece clamping device 3 can rotate and movement, uniformly adheres to conducive to 100 surface of workpiece to be plated or inner cavity
The atom or molecule that target 2 sputters, the coating film thickness being plated on surface are uniform.
Linkage mechanism 4 is connected with target 2, control target 2 realize multi-angle rotary, thus can control target 2 deeply to
Plating 100 surface of internal cavity of workpiece, perhaps complex-shaped outer surface of workpiece rotatable sputtering atom or molecule make surface of internal cavity or shape
The outer surface of workpiece of shape complexity can be also exposed in plated film atmosphere, to obtain uniform plated film.Similarly, linkage mechanism 4
It is connected with Workpiece clamping device 3, controls workpiece to be plated 100 fixed on Workpiece clamping device 3 and realize multi-angle rotary, thus
Controllable target 2 gos deep into inner-cavity part inside or complex-shaped outer surface of workpiece rotatable sputtering atom or molecule, makes inner cavity table
Face or complex-shaped outer surface of workpiece can be also exposed in plated film atmosphere, to obtain uniform plated film.
Linkage mechanism 4 and target 2 or 3 connecting pin of Workpiece clamping device are equipped with the rotation for rotating target 2 or linkage mechanism 4
Mechanism 41.Linkage mechanism 4 can originally drive coupled target 2 or the rotation of Workpiece clamping device 3 and movement, in conjunction with rotation
Mechanism makes the rotation of target 2 or Workpiece clamping device 3 with more flexibility.The movement of linkage mechanism 4 and rotating mechanism is not
Relevant, when 4 ontology of linkage mechanism is static, rotating mechanism can drive coupled target 2 or Workpiece clamping device 3 to revolve
Turn；Also can be while linkage mechanism 4 drive coupled target 2 or the rotation of Workpiece clamping device 3 with rotation, rotating mechanism
41 drivings coupled target 2 or Workpiece clamping device 3 rotate.
Linkage mechanism 4 is triaxial connecting system, four-axle linked mechanism, five-axle linkage mechanism, six-axis linkage in the present invention
One of mechanism or other multi-axes synchronous mechanisms.Which kind of linkage mechanism vacuum coater, which specifically uses, needs according to Vacuum Deposition
Depending on the complexity of film device and workpiece to be plated.In general, vacuum coater technical requirements are higher with workpiece to be plated
Shape is more complicated, then the linkage mechanism number of axle for needing to use is higher, but no matter with that linkage mechanism does not affect vacuum
Coating apparatus to the plated film of complicated shape workpiece to be plated, both no matter with that linkage mechanism can to have complicated shape to
It plates workpiece and carries out plated film.
The range of the linkage mechanism driving target of target 2 is target and Workpiece clamping plate place two sides in vacuum cavity
The 1/3-4/5 of length.The position that linkage mechanism 4 can drive target to extend to is at a distance from 1 side wall of vacuum cavity where target
The 1/3-3/4 of two side lengths of target and Workpiece clamping plate place in 1 body of vacuum cavity.The linkage designed in this data area
Mechanism can drive target to fully penetrate into workpiece lumen rotation to be plated and be sputtered, can make the entire surface to be plated of workpiece 100 to be plated
Adhere to uniform atom or molecule completes deposition plating.
Similarly, the linkage mechanism of Workpiece clamping device 3 drives the range of the target 2 for institute in vacuum cavity 1
The 1/3-4/5 of two side lengths where stating target 2 and Workpiece clamping device 3.
In the design basis that the utility model linkage structure is equipped with rotating mechanism 41, it is preferable that rotating mechanism 41 includes
Rocking bar, connecting rod, connecting rod and motor.It is set to due to rotating mechanism on one end of linkage mechanism 4, and in order not to take up space,
The volume of rotating mechanism is smaller.
It is preferably 1-8 in intracorporal 2 quantity of target of vacuum chamber, target 2 can be connected with linkage mechanism 4, can also be one
The target of dosis refracta is connected with linkage mechanism, and another part quantity target sputters workpiece as fixed target, also may be used
It is not connected with linkage mechanism all as fixed target, concrete condition needs are set according to the condition of production.
Workpiece clamping device 3 is fixture or fixture group in the present invention.When Workpiece clamping device is fixture group, folder
The fixture quantity of tool group is preferably 2-8, fixture quantity within this range when, workpiece 100 to be plated will not phase in coating process
It mutually influences, when fixture quantity is too many, the workpiece to be plated on fixture intensively influences very much plated film.
When Workpiece clamping device is in addition to being fixture or fixture group, Workpiece clamping device 3 can be in the present invention
It is hanger or hanger group.Similarly, when Workpiece clamping device is hanger group, the hanger quantity of hanger group is preferably 2-8, is hung
When having quantity within this range, workpiece 100 to be plated will not influence each other in coating process.
Vacuum cavity side wall is set there are two through-hole（It is not identified in figure）, a through-hole can be connected with vacuum pump apparatus, be used for
The intracorporal air pressure of vacuum chamber is set to reach vacuum state pumping in vacuum cavity, another through-hole can be with inert gas installation phase
Even, for being filled with suitable inert gas after vacuum cavity vacuumizes, suitable film coating environment is built.
Embodiment is enumerated below, and the utility model is preferably described：
Embodiment 1 as shown in Fig. 1, Workpiece clamping device 3 is not connected with linkage mechanism 4, but directly with vacuum chamber side
Wall is connected, and target 2 is then connected by linkage mechanism with 1 side wall of vacuum cavity.The linkage mechanism phase less with the number of axle of target 2 at this time
Even, then the vacuum cavity 1 is relatively suitble to machining shape workpiece 100 simply to be plated, but is equally capable of processing complex-shaped to be plated
Workpiece.
Embodiment 2 as shown in Fig. 2, Workpiece clamping device 3 is not connected with linkage mechanism 4, but directly with vacuum chamber side
Wall is connected, and target 2 is then connected by linkage mechanism with 1 side wall of vacuum cavity.Unlike the first embodiment：It is connected with target
The number of axle of linkage mechanism is more than embodiment 1, more flexible due to its rotation more than the number of axle and speed ratio embodiment 1, more conducively
The workpiece to be plated of machining shape complexity.
Embodiment 3 is as shown in Fig. 3, unlike the first embodiment：Workpiece clamping device 3 and target 2 pass through gear
Structure 4 is connected with 1 side wall of vacuum cavity, and the quantity more than one of the intracorporal Workpiece clamping device of vacuum chamber, and single workpiece clamp
Tight device is connected with single linkage mechanism respectively.Linkage mechanism is divided into the two sides different from the connected side of vacuum cavity target, but
Linkage mechanism makes the workpiece to be plated on Workpiece clamping device opposite with electrode assembly.Workpiece clamping device and single linkage mechanism
It is connected, is mutually not attached to each other, therefore can simultaneous processing workpiece to be plated of different shapes.Due to its Workpiece clamping device and target
Material passes through linkage mechanism and is connected with vacuum cavity side wall, during processing workpiece to be plated, on Workpiece clamping device to
Plating workpiece and target can linkage mechanism be rotated by with it is mobile, therefore have more flexibility, it is more multiple to be capable of processing shape
Miscellaneous workpiece to be plated.
As shown in Fig. 4, Workpiece clamping device 3 and target 2 are connected with linkage mechanism 4 embodiment 4, and multiple workpiece clamps
Tight device is connected with the same linkage mechanism.Multiple Workpiece clamping devices are connected with the same linkage mechanism, so it is more suitable for
The identical workpiece to be plated of simultaneous processing shape.Since its Workpiece clamping device 3 and target pass through linkage mechanism and vacuum cavity
Side wall is connected, and during processing workpiece to be plated, workpiece to be plated and target on Workpiece clamping device can be in linkage mechanisms
Be rotated by with it is mobile, therefore have more flexibility, be capable of processing the more complicated workpiece to be plated of shape.
As shown in Fig. 5, Workpiece clamping device 3 is connected by linkage mechanism 4 with 1 side wall of vacuum cavity embodiment 5, and more
A Workpiece clamping device is connected with a linkage mechanism.Multiple Workpiece clamping devices 3 are connected with the same linkage mechanism, so its
It is more suitable for the identical workpiece to be plated of simultaneous processing shape.Target 2 is not connected by linkage mechanism with vacuum cavity side wall, in this reality
It applies target in example to be connected by guide rod with vacuum cavity, but the utility model does not limit target passes through which kind of structure and vacuum cavity
Side wall is connected.Workpiece clamping device rotates under the driving of linkage mechanism and movement, can equally make outer surface of workpiece or inner cavity table
Face plates uniform film.
As shown in Fig. 6, Workpiece clamping device 3 and target 2 are connected with linkage mechanism 4 embodiment 6, and target 2 is linking
It is protruded under the driving of mechanism and carries out sputtering target material in the workpiece lumen on Workpiece clamping device 3, workpiece lumen surface carries out plated film.
In embodiment six, the linkage mechanism that Workpiece clamping device is connect with target cooperates jointly, completes the plated film of workpiece lumen.
The above embodiments are only used for that preferably the utility model is described, and do not limit the utility model
It makes, more than above-mentioned this enumerated five kinds of structures of vacuum coater structure included by the utility model.
Finally, it should be noted that above embodiments be only to illustrate the technical solution of the embodiment of the present invention rather than to its into
Row limitation, although the embodiment of the present invention is described in detail referring to preferred embodiment, those skilled in the art
It should be understood that the technical solution of the embodiment of the present invention can be still modified or replaced equivalently, and these are modified or wait
The range of modified technical solution disengaging technical solution of the embodiment of the present invention cannot also be made with replacement.
Claims (10)
1. a kind of vacuum coater, including vacuum cavity, the target and Workpiece clamping device that are connected with power supply, feature exists
In：
The target and the Workpiece clamping device are installed in vacuum cavity, and appointing in the target and Workpiece clamping device
One or both is connected by linkage mechanism with vacuum cavity side wall；
The linkage mechanism and the target or the Workpiece clamping device connecting pin, which are equipped with, makes the target or the gear
The rotating mechanism of structure rotation.
2. vacuum coater as described in claim 1, which is characterized in that the linkage mechanism is triaxial connecting system, four
One of axis linkage mechanism, five-axle linkage mechanism, six-axis linkage mechanism or other multi-axes synchronous mechanisms.
3. vacuum coater as described in claim 1, which is characterized in that the target sets up separately with the Workpiece clamping device
In vacuum cavity two sides.
4. vacuum coater as described in claim 1, which is characterized in that the linkage mechanism of the target drives the target
Range be two side lengths where the target and the Workpiece clamping device in vacuum cavity 1/3-4/5.
5. vacuum coater as described in claim 1, which is characterized in that the linkage mechanism of the Workpiece clamping device drives
The range of the target is the 1/3-4/ of two side lengths of the target and Workpiece clamping device place in vacuum cavity
5。
6. vacuum coater as described in claim 1, which is characterized in that the rotating mechanism includes rocking bar, connecting rod, company
Bar and motor.
7. vacuum coater as described in claim 1, which is characterized in that the intracorporal target quantity of vacuum chamber is 1-8
It is a.
8. vacuum coater as described in claim 1, which is characterized in that the Workpiece clamping device is fixture or fixture
Group.
9. vacuum coater as claimed in claim 8, which is characterized in that the fixture quantity of the fixture group is 2-8.
10. vacuum coater as described in claim 1, which is characterized in that the Workpiece clamping device is hanger or hanger
Group, and the hanger quantity of the hanger group is 2-8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820659339.6U CN208136324U (en) | 2018-05-04 | 2018-05-04 | A kind of vacuum coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820659339.6U CN208136324U (en) | 2018-05-04 | 2018-05-04 | A kind of vacuum coater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208136324U true CN208136324U (en) | 2018-11-23 |
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ID=64312500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820659339.6U Active CN208136324U (en) | 2018-05-04 | 2018-05-04 | A kind of vacuum coater |
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| Country | Link |
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| CN (1) | CN208136324U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110144558A (en) * | 2019-04-29 | 2019-08-20 | 河南东微电子材料有限公司 | A kind of magnetic-controlled sputtering coating equipment |
| CN113355642A (en) * | 2021-04-25 | 2021-09-07 | 江苏微纳光膜科技有限公司 | Optical coating press-in device |
-
2018
- 2018-05-04 CN CN201820659339.6U patent/CN208136324U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110144558A (en) * | 2019-04-29 | 2019-08-20 | 河南东微电子材料有限公司 | A kind of magnetic-controlled sputtering coating equipment |
| CN110144558B (en) * | 2019-04-29 | 2021-06-11 | 河南东微电子材料有限公司 | Magnetron sputtering coating equipment |
| CN113355642A (en) * | 2021-04-25 | 2021-09-07 | 江苏微纳光膜科技有限公司 | Optical coating press-in device |
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