CN216192675U - Glass double-sided coating magnetron sputtering coating machine - Google Patents

Glass double-sided coating magnetron sputtering coating machine Download PDF

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Publication number
CN216192675U
CN216192675U CN202122342310.XU CN202122342310U CN216192675U CN 216192675 U CN216192675 U CN 216192675U CN 202122342310 U CN202122342310 U CN 202122342310U CN 216192675 U CN216192675 U CN 216192675U
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coating
cavity
glass
magnetron sputtering
double
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CN202122342310.XU
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Chinese (zh)
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孙明春
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Beijing Carbon Value Environmental Development Center LP
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Beijing Carbon Value Environmental Development Center LP
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Abstract

The utility model relates to the technical field of glass coating equipment, in particular to a magnetron sputtering coating machine for coating a double-sided glass coating, which comprises a coating cavity, wherein two sides of the coating cavity are respectively and fixedly connected with a vacuum interface, a plurality of coating instruments are arranged in the coating cavity, the upper side and the lower side of the coating cavity are respectively provided with a sliding chute, a sliding rail is respectively connected in the two sliding chutes in a sliding manner, two sides of each sliding rail are respectively inserted with a limiting plate, one side of the coating cavity is rotatably connected with a sealing cover, and the bottom of the coating cavity, which is close to one side of the sealing cover, is provided with a lock catch. The utility model has the advantages that: through seting up the spout, glass is cut apart into two parts with the coating film cavity, realizes that the glass two sides carries out the coating film work simultaneously, and coating film efficiency is higher, and the slide rail possesses better maneuverability, possess sufficient operating space, and safe high-efficient more when the operation, effectively protects product and operating personnel's safety.

Description

Glass double-sided coating magnetron sputtering coating machine
Technical Field
The utility model relates to the technical field of glass coating equipment, in particular to a magnetron sputtering coating machine for double-sided coating of glass.
Background
In recent years, buildings are more and more diversified in aspects of energy saving, style and the like, coated glass is more and more commonly used in the field of buildings, at present, magnetron sputtering film forming becomes a novel physical vapor film forming mode, magnetron sputtering film coating machines are more and more widely applied in the production of glass film coating, the sputtering technology belongs to one of PVD (physical vapor deposition) technology, and is one of important methods for preparing film materials, the magnetron sputtering method is a method for guiding ions to a target electrode (cathode) made of a substance to be sputtered by utilizing the characteristic that charged particles have certain kinetic energy after being accelerated in an electric field, sputtering target atoms to move to a substrate along a certain direction and finally deposit and form a film on the substrate, the magnetron sputtering is a method for controlling the movement track of the electrons in the electric field by combining the magnetron principle with the common sputtering technology and utilizing the special distribution of the magnetic field, the sputtering technology is improved, so that the thickness and uniformity of a coated film are controllable, the prepared film is good in compactness, strong in cohesive force and high in purity, the magnetron sputtering technology becomes an important means for preparing various functional films, PVD products applying the magnetron sputtering technology are widely applied to the fields of integrated circuits, semiconductor illumination, micro electro mechanical systems, advanced packaging and the like, a coating machine in the prior art can only carry out single-side coating due to the limitation of a vacuum environment during coating, the coating efficiency is low, and the action is limited when glass is placed due to the narrow space in a coating cavity, so that the operation is very inconvenient.
Aiming at the problems, the utility model provides a magnetron sputtering coating machine for double-sided coating of glass, which can perfectly solve the problems.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the defects of the prior art and provides a magnetron sputtering coating machine for coating a double-sided glass film.
The purpose of the utility model is realized by the following technical scheme: the utility model provides a two-sided coating film magnetron sputtering coating machine of glass, includes the coating film cavity, vacuum interface of both sides difference fixedly connected with of coating film cavity, the inside of coating film cavity is provided with a plurality of coating film appearance, a spout has all been seted up to the upper and lower both sides of coating film cavity, two sliding connection has a slide rail in the spout respectively, every peg graft respectively in the both sides of slide rail has a limiting plate, one side of coating film cavity is rotated and is connected with a sealed lid, the coating film cavity is close to the bottom of sealed lid one side and is provided with a hasp, a plurality of supporting leg of bottom fixedly connected with of coating film cavity.
Optionally, the coating cavity is of a hollow cylindrical structure, one side of the coating cavity close to the sealing cover is of a uncovered structure, the vacuum ports are of hollow cylindrical structures with uncovered ends, and the inner cavities of the two vacuum ports are communicated with the inner cavity of the coating cavity.
Optionally, the plurality of coating apparatuses are uniformly and fixedly connected to the inner surfaces of the two sides of the coating cavity, the plurality of coating apparatuses on the same side are distributed in a circumferential array with the axis of the coating cavity as the center of a circle, and an included angle formed by two adjacent coating apparatuses on the same vertical plane with the axis of the coating cavity as the center of a circle is forty-five degrees.
Optionally, the lengths of the two sliding grooves are smaller than the length of the inner cavity of the coating cavity, and one end of each sliding groove penetrates through one end, close to the sealing cover, of the coating cavity.
Optionally, the outer surface of the slide rail is matched with the inner surface of the sliding groove, the length of the slide rail is equal to that of the sliding groove, the slide rail is connected to the inner surface of the sliding groove in a sliding manner, and a plurality of through holes are formed in two sides of each slide rail.
Optionally, every the equal fixedly connected with a plurality of spacing axle in one side of limiting plate, the diameter of spacing axle equals with the internal surface diameter of through-hole, and every spacing axle sets up with the axle center with a plurality of through-hole.
Optionally, each spring is inserted into the outer surface of the limiting shaft, the spring is arranged on one side, close to the limiting plate, of the limiting shaft, and two ends of the spring are respectively lapped with the sliding rail and the limiting plate.
Optionally, the top of the coating cavity close to one side of the sealing cover is fixedly connected with a hinged sheet, one side of the sealing cover is fixedly connected with a hinged block, the outer surface of the hinged sheet is matched with the inner surface of the hinged block, the sealing cover is rotatably connected onto the hinged sheet through a pin, and one side of the sealing cover is fixedly connected with an annular sealing ring.
Optionally, a lantern ring is fixedly connected to the bottom of the film coating cavity close to one side of the sealing cover, the diameter of the outer surface of the lock catch is equal to the diameter of the inner surface of the lantern ring, the lock catch is rotatably connected in the lantern ring, and when the lock catch is in a vertical state, the lock catch is just in lap joint with the surface of one side of the sealing cover.
The utility model has the following advantages:
1. the coating machine in the prior art can only carry out single-side coating due to the limitation of a vacuum environment during coating, and the coating efficiency is low.
2. The utility model has the advantages that the slide rails sliding in the sliding grooves are additionally arranged, the slide rails can slide outwards when the glass is placed, the slide rails can be adjusted to a proper position and have better operability, then the glass is respectively fixed on the two slide rails, and then the slide rails integrally drive the glass to be pushed into the coating cavity, so that the coating cavity has enough operating space, is safer and more efficient during operation, and effectively protects the safety of products and operators.
Drawings
FIG. 1 is a schematic diagram of a first perspective of the present invention;
FIG. 2 is an enlarged schematic view of FIG. 1 at A according to the present invention;
FIG. 3 is an enlarged view of the structure of FIG. 1 at B according to the present invention;
fig. 4 is a schematic view of a connection structure of the limiting plate of the utility model.
In the figure: the method comprises the following steps of 1-coating cavity, 101-hinging sheet, 102-lantern ring, 2-vacuum interface, 3-coating instrument, 4-chute, 5-slide rail, 501-through hole, 6-limiting plate, 601-limiting shaft, 602-spring, 7-sealing cover, 701-hinging block, 702-sealing ring, 8-lock catch and 9-supporting leg.
Detailed Description
The utility model will be further described with reference to the accompanying drawings, but the scope of the utility model is not limited to the following.
As shown in figure 1, a two-sided coating film magnetron sputtering coating machine of glass, it includes coating film cavity 1, vacuum interface 2 of fixedly connected with is respectively distinguished to coating film cavity 1's both sides, coating film cavity 1's inside is provided with a plurality of coating film appearance 3, a spout 4 has all been seted up to coating film cavity 1's upper and lower both sides, sliding connection has a slide rail 5 in two spout 4 respectively, limiting plate 6 has been pegged graft respectively to every slide rail 5's both sides, one side of coating film cavity 1 is rotated and is connected with a sealed lid 7, coating film cavity 1 is close to the bottom of sealed lid 3 one side and is provided with a hasp 8, coating film cavity 1's bottom fixedly connected with a plurality of supporting leg 9.
As a preferred technical scheme of the utility model: coating film cavity 1 is a hollow cylinder structure, one side that coating film cavity 1 is close to sealed lid 7 is uncovered structure, vacuum interface 2 is the hollow cylinder structure that both ends are uncovered, the inner chamber of two vacuum interface 2 all is linked together with coating film cavity 1's inner chamber, be connected the vacuum pipe respectively with two vacuum interface 2 casees, two symmetrical vacuum interface 2 can make the evacuation speed of both sides the same when the evacuation, prevent that the pressure difference of both sides from leading to the product to be damaged.
As a preferred technical scheme of the utility model: the coating apparatus 3 is uniformly and fixedly connected to the inner surfaces of two sides of the coating cavity 1, the coating apparatus 3 on the same side are distributed in a circumferential array mode by taking the axis of the coating cavity 1 as the center of a circle, the included angle formed by the two adjacent coating apparatuses 3 on the same vertical plane by taking the axis of the coating cavity 1 as the center of a circle is forty-five degrees, the coating apparatuses 3 uniformly distributed on two sides of the coating cavity 1 can uniformly coat the glass, so that the coating thickness and uniformity are controllable, the prepared film is good in compactness, strong in cohesive force and high in purity, and the yield of the produced product is higher.
As a preferred technical scheme of the utility model: the length of two spouts 4 is less than the length of the 1 inner chamber of coating film cavity, the one end of two spouts 4 runs through to the one end that coating film cavity 1 is close to sealed lid 6, spout 4 is seted up to the upper and lower both sides of coating film cavity 1, when the glass that needs the coating film is installed to the centre of two slide rails 5, four limiting plates 6 receive behind the elasticity of spring 602, can press from both sides glass tight fixed, glass cuts apart into two parts with coating film cavity 1 this moment, can realize that the two sides of glass carry out the coating film work simultaneously, compare in single face coating equipment, coating film efficiency is higher.
As a preferred technical scheme of the utility model: the outer surface of the slide rail 5 is matched with the inner surface of the sliding chute 4, the length of the two slide rails 5 is equal to that of the sliding chute 4, the two slide rails 5 are respectively connected to the inner surface of the sliding chute 4 in a sliding mode, and the two sides of each slide rail 5 are respectively provided with the plurality of through holes 501.
As a preferred technical scheme of the utility model: the equal fixedly connected with a plurality of spacing axle 601 in one side of every limiting plate 6, the diameter of spacing axle 601 equals with the internal surface diameter of through-hole 501, and every spacing axle 601 sets up with the axle center with a plurality of through-hole 501, and the equal fixed connection in one side that limiting plate 6 was kept away from to a plurality of spacing axles 601 prevents that spacing axle 601 from droing in the through-hole 501 on same fixed plate.
As a preferred technical scheme of the utility model: the outer surface of each limiting shaft 601 is inserted with a spring 602, the spring 602 is arranged on one side of the limiting shaft 601 close to the limiting plate 6, two ends of the spring 602 are respectively overlapped with the sliding rail 5 and the limiting plate 6, and the four limiting plates 6 can clamp and fix the glass after being subjected to the elastic force of the spring 602.
As a preferred technical scheme of the utility model: the top of coating film cavity 1 near sealed lid 7 one side fixedly connected with articulates piece 101, articulated piece 701 of one side fixedly connected with of sealed lid 7, the surface of articulated piece 101 and the internal surface looks adaptation of articulated piece 701, sealed lid 7 is connected on articulated piece 101 through pin rotation, annular sealing washer 702 of one side fixedly connected with of sealed lid 7, sealing washer 702 is the rubber material, can guarantee coating film cavity 1's gas tightness better.
As a preferred technical scheme of the utility model: the bottom of the film coating cavity 1 close to one side of the sealing cover 7 is fixedly connected with a lantern ring 102, the diameter of the outer surface of the lock catch 8 is equal to the diameter of the inner surface of the lantern ring 102, the lock catch 8 is rotatably connected in the lantern ring 102, and when the lock catch 8 is in a vertical state, the lock catch 8 is just overlapped with the surface of one side of the sealing cover 7.
In summary, the following steps: the coating machine in the prior art can only carry out single-side coating due to the limitation of a vacuum environment during coating, the coating efficiency is lower, the utility model can clamp and fix glass by arranging the sliding chutes 4 at the upper side and the lower side of the coating cavity 1, when the glass to be coated is arranged between the two sliding rails 5, the four limiting plates 6 are subjected to the elasticity of the spring 602, and the glass divides the coating cavity 1 into two parts, so that the two sides of the glass can be simultaneously coated, compared with single-side coating equipment, the coating efficiency is higher, the coating instruments 3 uniformly distributed at the two sides of the coating cavity 1 can uniformly coat the glass, so that the coating thickness and uniformity are controllable, the prepared film has good compactness, strong cohesive force and high purity, the yield of the produced product is higher, and the action is limited when the glass is placed due to the narrow space in the coating cavity, the utility model has the advantages that by adding the sliding rails 5 which slide in the sliding grooves 4, the sliding rails 5 can slide outwards when the glass is placed, the glass has better operability after being adjusted to a proper position, then the glass is respectively fixed on the two sliding rails 5, and then the sliding rails 5 integrally drive the glass to be pushed into the coating cavity 1, so that the glass coating device has enough operating space, is safer and more efficient in operation, and effectively protects the safety of products and operators.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (9)

1. A magnetron sputtering coating machine for double-sided coating of glass is characterized in that: including coating film cavity (1), vacuum interface (2) of both sides difference fixedly connected with of coating film cavity (1), the inside of coating film cavity (1) is provided with a plurality of coating film appearance (3), one spout (4), two have all been seted up to the upper and lower both sides of coating film cavity (1) sliding connection has a slide rail (5) in spout (4) respectively, every peg graft respectively in the both sides of slide rail (5) have a limiting plate (6), one side of coating film cavity (1) is rotated and is connected with a sealed lid (7), the bottom that coating film cavity (1) is close to sealed lid (7) one side is provided with one hasp (8), the bottom fixedly connected with a plurality of supporting leg (9) of coating film cavity (1).
2. The magnetron sputtering coating machine for coating a double surface of glass according to claim 1, which is characterized in that: the coating cavity (1) is of a hollow cylindrical structure, one side, close to the sealing cover (7), of the coating cavity (1) is of a uncovered structure, the vacuum ports (2) are of hollow cylindrical structures with uncovered ends, and the inner cavities of the two vacuum ports (2) are communicated with the inner cavity of the coating cavity (1).
3. The magnetron sputtering coating machine for coating a double surface of glass according to claim 1, which is characterized in that: the coating devices (3) are uniformly and fixedly connected to the inner surfaces of two sides of the coating cavity (1), the coating devices (3) on the same side are distributed in a circumferential array mode by taking the axis of the coating cavity (1) as the center of a circle, and the included angle formed by two adjacent coating devices (3) on the same vertical plane by taking the axis of the coating cavity (1) as the center of a circle is forty-five degrees.
4. The magnetron sputtering coating machine for coating a double surface of glass according to claim 1, which is characterized in that: the length of the two sliding grooves (4) is smaller than that of the inner cavity of the coating cavity (1), and one end of each sliding groove (4) penetrates through one end, close to the sealing cover (7), of the coating cavity (1).
5. The magnetron sputtering coating machine for coating a double surface of glass according to claim 1, which is characterized in that: the surface of slide rail (5) and the internal surface looks adaptation of spout (4), two the length of slide rail (5) equals with the length of spout (4), two slide rail (5) sliding connection respectively in the internal surface of spout (4), every a plurality of through-hole (501) have all been seted up to the both sides of slide rail (5).
6. The magnetron sputtering coating machine for coating a double surface of glass according to claim 1, which is characterized in that: every the equal fixedly connected with a plurality of spacing axle (601) of one side of limiting plate (6), the diameter of spacing axle (601) equals with the internal surface diameter of through-hole (501), and every spacing axle (601) sets up with the axle center with a plurality of through-hole (501).
7. The magnetron sputtering coating machine for coating a double surface of glass according to claim 6, which is characterized in that: every the surface of spacing axle (601) all pegs graft and has a spring (602), spring (602) set up in one side that spacing axle (601) are close to limiting plate (6), the both ends of spring (602) overlap joint with slide rail (5) and limiting plate (6) respectively.
8. The magnetron sputtering coating machine for coating a double surface of glass according to claim 1, which is characterized in that: coating film cavity (1) is close to articulated piece (101) of top fixedly connected with of sealed lid (7) one side, articulated piece (701) of one side fixedly connected with of sealed lid (7), the surface of articulated piece (101) and the internal surface looks adaptation of articulated piece (701), sealed lid (7) are connected on articulated piece (101) through the pin rotation, annular sealing washer (702) of one side fixedly connected with of sealed lid (7).
9. The magnetron sputtering coating machine for coating a double surface of glass according to claim 1, which is characterized in that: the bottom of one side, close to the sealing cover (7), of the film coating cavity (1) is fixedly connected with a lantern ring (102), the diameter of the outer surface of the lock catch (8) is equal to the diameter of the inner surface of the lantern ring (102), the lock catch (8) is rotatably connected into the lantern ring (102), and when the lock catch (8) is in a vertical state, the lock catch (8) is just overlapped with the surface of one side of the sealing cover (7).
CN202122342310.XU 2021-09-27 2021-09-27 Glass double-sided coating magnetron sputtering coating machine Active CN216192675U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202122342310.XU CN216192675U (en) 2021-09-27 2021-09-27 Glass double-sided coating magnetron sputtering coating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202122342310.XU CN216192675U (en) 2021-09-27 2021-09-27 Glass double-sided coating magnetron sputtering coating machine

Publications (1)

Publication Number Publication Date
CN216192675U true CN216192675U (en) 2022-04-05

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ID=80925733

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202122342310.XU Active CN216192675U (en) 2021-09-27 2021-09-27 Glass double-sided coating magnetron sputtering coating machine

Country Status (1)

Country Link
CN (1) CN216192675U (en)

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