JPS5845175B2 - Rotary evaporation equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement of a rotary evaporation apparatus that sequentially forms evaporated films on the surfaces of a plurality of substrates accommodated at the same time. Installed in a supported manner,
The present invention also relates to a new vapor deposition apparatus which has been improved so that the angle of the rotating hanging device is regulated by a driven roller and a guide member.

Conventionally, for example, in the manufacturing process of indirect discharge type gas discharge display panels, when a dielectric layer such as Al2O3 is formed by covering a predetermined pattern of electrodes formed on a glass substrate,
From the standpoint of mass production, a rotary vapor deposition apparatus as shown in FIG. 1 was used.

That is, in FIG. 1, 1 is a cylindrical vacuum container serving as a vapor deposition tank, 2 is a vapor deposition sample container installed in the vacuum container 1, 3 is a vapor deposition sample accommodated in the vapor deposition sample container,
4 is a rotating frame for fixing the substrate 5 to be vapor-deposited; 6 is a heater; 1 is a rotation transmission roller for rotating the rotating frame 4;

In a rotary evaporation apparatus having such a configuration, a substrate 5 on which an electrode pattern has been formed in advance is attached to each side of the rotating frame 4 so that the surface to be evaporated faces inward, and a predetermined evaporation sample 3 such as Al2O3 is evaporated. The sample is stored in the sample container 2.

Then, when the vacuum chamber 1 is evacuated by a vacuum pump (not shown) and the rotating frame 4 is rotated in the direction of arrow A by the rotational conduction roller 1 while maintaining a high vacuum, the surface on which the vapor deposited film of the substrate 5 is formed is placed above the vapor deposition sample 3. They will be located sequentially.

By heating and evaporating the vapor deposition sample 3 in this manner, a vapor deposition film can be sequentially formed on each of the vapor deposition film formation surfaces of the plurality of substrates 5 attached to each side of the rotating frame 4.

However, in a rotary evaporation apparatus with such a configuration,
The vapor deposited film adheres not only to the vapor deposited film forming surface of the substrate 5 but also to other parts.

If the thickness of the deposit is greater than 8, the deposit may easily peel off due to thermal cycles within the vacuum container 1 and may fall.

In this case, among the substrates 5 on which the vapor deposited film is formed, the substrate located on the lower side has the vapor deposited film forming surface facing upward.
When the deposits peel off and fall on the vapor deposited film formation surface -F, they remain as foreign matter and are trapped between the next vapor deposited film, which impairs the uniformity of the vapor deposited film.

Therefore, the present inventors previously proposed an improvement to a rotary vapor deposition apparatus as shown in FIG.

This is based on the concept of rotating the rotating frame 8 while the vapor-deposited film forming substrate 5 is always held downward.
In the figure, reference numeral 8 denotes a rotating frame from which the substrate 5 is suspended, and 9 denotes a plurality of hanging tools rotatably supported by a shaft 10 at substantially equally spaced positions on the circumference of the rotating frame 8.

With the configuration shown in FIG. 2, the substrate 5 is attached to the plurality of hanging tools 9 so that the deposited film forming surface faces downward, and when the rotating frame 8 is rotated in the direction of arrow A, the substrate 5 is attached. The hanging tool 9 is always held horizontally by gravity, and the surface of the substrate 5 on which the vapor deposited film is formed also always faces downward.

In this way, even if unnecessary vapor deposits attached to a surface other than the surface on which the vapor deposited film is formed of the substrate 5 peel off and fall, the surface on which the vapor deposited film is formed on the substrate 5 is always in a horizontal state facing downward, so that the vapor deposited film cannot be formed. This eliminates the possibility of adhesion to the surface, making it possible to form a high-quality deposited film.

However, in such a co-rotating vapor deposition method, the hanging device always faces in the vertical direction due to its own weight, and the outer rotation locus of the substrate becomes an ellipse. For example, when it comes to a large substrate such as the substrate 5' shown by the dotted line, there is no problem in the vertical position, but the rotation locus collides with the container 1 in the lateral direction, causing the vacuum container 1 circle to be damaged. Vapor deposition has become impossible, creating the problem of having to modify the structure of the vacuum vessel itself.

The present invention was made to solve the above problems, and is the only innovative rotary evaporation device that enables the formation of evaporated films without changing the shape or size of the vacuum container even on large substrates. It provides:

Briefly stated, the present invention provides a rotary evaporation apparatus equipped with a rotating frame, in which a plurality of hanging devices for placing a vapor-deposited film forming substrate are provided on the rotating frame so as to be rotatably supported at approximately equal angles. and a driven roller is attached to at least one side of the suspension device, and a guide member is provided on the side of the rotating frame to guide the driven roller and regulate the angle of the suspension device. It is.

Hereinafter, the rotary vapor deposition apparatus according to the present invention will be explained in detail with reference to the drawings.

FIG. 3 is a side cross-sectional view showing one embodiment of the rotary evaporation apparatus according to the present invention, in which the same parts as in the previous figure are given the same reference numerals.

Reference numeral 11 denotes six suspension devices movably supported by shafts 12 [1] at positions approximately equally spaced on the circumference of both side plates of the rotating frame 8, and the suspension devices 11 are pivotally supported. A driven roller holding plate 13 is pivotally attached to one end of the shaft 12, and a pair of driven rollers 14 are rotatably supported at both ends of the driven roller holding plate.

Further, a guide member 15 for guiding the driven roller 14 is provided on the side of the rotating frame 8.

With this configuration, the substrate 5 on which the vapor deposited film is to be formed is fitted into each suspension tool 11 with the vapor deposition surface facing downward, and the rotating frame 8 is rotated by the rotation transmission roller 7 in the direction indicated by the arrow A.
When the suspension device 11 into which the substrate 5 is fitted is placed above the rotating frame 8, it is held in a horizontal state by gravity, and the vapor deposited film forming surface of the substrate 5 always faces downward. When the rotating frame 8 continues to rotate in the A direction and the suspension device 11 rotates laterally, the driven roller 14 is guided by the guide 15 shown by the two-dot broken line and rotates according to the regulated inclination angle, and the suspension device 11 rotates according to the regulated inclination angle. When the rotating frame 11 is rotated below the rotating frame 8, it maintains a substantially horizontal state, and the surface of the substrate 5 on which the deposited film is formed faces downward.

The suspension device 11 is rotatably supported on the rotating frame 8 in this way.
When it is above, it is in a horizontal state due to gravity, and when the suspension device 11 is on the side or below, it rotates while tilting according to the driven roller 14 guided by the guide 15. However, it maintains a downward direction below 90°.

The present invention is characterized by a configuration in which the rotation locus of the vapor deposited film forming substrate 5 is regulated by the guide member and the driven roller.

In this way, even if unnecessary vapor deposits attached to surfaces other than the vapor deposited film forming surface of the substrate 5 peel off and fall, they will not adhere to the vapor deposited film forming surface of the substrate 5, and a high quality vapor deposited film can be formed. .

Further, the suspension device 11 holding the substrate 5 is attached to the driven roller 1.
4, it is possible to efficiently deposit even a large substrate such as the substrate 5' without colliding with the inner wall of the container.

FIG. 4 shows the suspension device 11 and guide member 15 according to this embodiment.
In the detailed drawings, a is a perspective view of the suspension device 11, and b is a view facing the guide member 15iL, in which a driven roller is rotatably supported at the − side end of the suspension device 11 via a driven roller holding plate 13. 14
The figure shows the state in which it is guided by the guide 15 and rotates while tilting.

FIG. 5 is a side sectional view showing another embodiment of the rotary vapor deposition apparatus according to the present invention, in which the same parts as in the previous figure are given the same reference numerals.

Reference numeral 16 denotes six suspension devices which are rotatably supported by shafts 10 at approximately equal intervals on the circumference of both side plates of the rolling frame 8, and a support shaft 17 is attached to the holding plate of the suspension device 16. The driven roller holding plate 18 is fixed to the leading end of the driven roller holding plate 1.
a first driven roller 19 of different sizes at both ends of the roller 8;
A second driven roller 20 is rotatably supported, and the first driven roller 19 and the second driven roller 20 are respectively connected to a first guide 21 indicated by a two-dot broken line and a first guide 21 indicated by a dotted line. The angle of inclination is regulated by being guided by the guide 22 of No. 2.

If you change the size of the first driven roller 19 and the second driven roller 20 made of the same material, the weight will also change, so the difference in gravity will guide the driven rollers 19 and 20, respectively. Since the inclination angle of the base plate 5 is regulated, the rotation of the suspension tool 16 becomes more reliable and stable.

The operational relationship between such a driven roller and the guide member will be explained in detail in FIG.

FIG. 6 shows a detailed view of the suspension cane and guide of this embodiment,
a is a perspective view of the suspension device, and b is a front view of the guide, in which a pivot is rotatably supported at the end of the suspension device 16 on the side opposite to the holding plate of the base plate 5 via a support shaft 17 and a driven roller holding plate 18. The first
The figure also shows the state in which the second driven rollers 19 and 20 rotate while being guided by the corresponding guides 21 and 22, respectively.

7, 8, and 9 are perspective views schematically showing other embodiments of the driven roller and the guide, and FIG.
Consists of one driven roller 23 rotatably supported,
A groove 24' is provided in the guide 24, and the board 5 is held while being guided by the guide groove 24'! It is designed to rotate while regulating the angle of inclination of A16.

In FIG. 8, the guide is formed in a U-shaped groove, and the driven roller 23 is rotated at a predetermined angle of inclination along the U-shaped groove.

FIG. 9 shows a configuration in which a rail-shaped guide 26 is held between two driven rollers 23 supported on a shaft so as to be movable, and both have an inclination angle of 90° or less. It is configured so that the surface on which the deposited film is formed faces downward.

Incidentally, in all of the above embodiments, the inclination angle is regulated by a driven roller guided by a guide member, but the rotation of the rotating frame is controlled by attaching a magnetic material to the suspension device and arranging electromagnets on the guide. It is also possible to control the tilt angle in synchronization with the movement.

Furthermore, in this embodiment, the apparatus for forming a vapor deposited film for a dielectric layer on the surface of an electrode substrate of a gas discharge display panel was described in detail, but it can also be applied as a vapor deposition apparatus for mass production for various devices having other vapor deposition processes. It is possible.

As explained above, according to the rotary evaporation apparatus according to the present invention, the hanging device rotatably supported on the E-axis by the rotating frame is guided by the guide member, and the 1 angle of inclination is regulated, and I[i1 Regardless of the rotational position of the rotating frame, the surfaces on which the vapor deposited films of the plurality of substrates 5 are formed are always facing downward by 90" or less, so that it is possible to prevent unnecessary foreign matter from adhering within the vapor deposition apparatus, and moreover, the same vapor deposition can be performed. Since the apparatus can form a vapor deposited film on a plurality of types of substrates 5 having different external shapes, it is suitable for mass production, and it is possible to form a high quality vapor deposited film, which is extremely useful when applied to various vapor deposition apparatuses.

[Brief explanation of the drawing]

1 and 2 are side sectional views schematically showing a conventional rotary evaporation apparatus, and FIG. 3 is a side sectional view showing an embodiment of the rotary evaporation apparatus according to the present invention. 7, 8 and 9 are schematic perspective views showing other embodiments. 1: Vacuum container, 2: Vapor deposition sample container, 3: Vapor deposition sample, 4
, 8: [[11 rolling frame, 5: substrate, 6: heater,
1: Rotation transmission roller, 9: Hanging tool, 10, 12: Axis,
ICl3: Suspension device, 13, 18: Driven roller holding plate, 1
4, 19, 20, 23: Followed roller, 15.21. 2
2, 24, 25, 26: Guide, 17: Support shaft.

Claims (1)

[Claims] 1. In a rotary vapor deposition apparatus equipped with a rotating frame, a plurality of hanging devices for placing a substrate on which a vapor deposited film is formed are rotatably supported on the rotating frame at approximately equal angles, and at least one of the hanging devices is provided. A rotary vapor deposition apparatus, characterized in that a driven roller is attached to one side, and a guide member is provided on a side of the rotating frame to guide the driven roller and regulate the angle of the hanging device.