JPS5638824A - Rotary type evaporation device - Google Patents

Rotary type evaporation device

Info

Publication number
JPS5638824A
JPS5638824A JP10533279A JP10533279A JPS5638824A JP S5638824 A JPS5638824 A JP S5638824A JP 10533279 A JP10533279 A JP 10533279A JP 10533279 A JP10533279 A JP 10533279A JP S5638824 A JPS5638824 A JP S5638824A
Authority
JP
Japan
Prior art keywords
shafts
hanging
angle
follower rollers
evaporation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10533279A
Other languages
Japanese (ja)
Other versions
JPS5845175B2 (en
Inventor
Toshinori Urade
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10533279A priority Critical patent/JPS5845175B2/en
Publication of JPS5638824A publication Critical patent/JPS5638824A/en
Publication of JPS5845175B2 publication Critical patent/JPS5845175B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE:To prevent the adhesion of a useless foreign matter to a substrate in the rotary evaporation device by a method wherein guiding members to guide follower rollers being provided at one side of each hanging tool and to control the angle of each hanging too lare provided at the sides of rotating frame of the device. CONSTITUTION:On the circumference of both side plates of a rotating frame 8 in the rotary evaporation device, shafts 12 are arranged at an equal interval and hanging tools 11 are supported by the shafts 12 rotation freely with the shaft. Follower roller holding plates 13 are sticked to the shafts 12 rotation freely with the shaft by a pair of follower rollers 14. Guiding members 15 to guide the follower rollers 14 and to control the angle of inclination of the hanging tools 11 are provided at the sides of the rotating machine 8. By this way, the evaporation film forming face of substrate 5 are kept always in downward having the angle of inclination less than 90 deg. preventing the adhesion of a foreign matter to the evaporation film forming face of substrates 5 generating by the peeling off of evaporated substance adhering to a vessel 1, and the using of plural kind of substrates 5, 5' having the different external forms becomes possible to be suitable for the mass production.
JP10533279A 1979-08-17 1979-08-17 Rotary evaporation equipment Expired JPS5845175B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10533279A JPS5845175B2 (en) 1979-08-17 1979-08-17 Rotary evaporation equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10533279A JPS5845175B2 (en) 1979-08-17 1979-08-17 Rotary evaporation equipment

Publications (2)

Publication Number Publication Date
JPS5638824A true JPS5638824A (en) 1981-04-14
JPS5845175B2 JPS5845175B2 (en) 1983-10-07

Family

ID=14404762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10533279A Expired JPS5845175B2 (en) 1979-08-17 1979-08-17 Rotary evaporation equipment

Country Status (1)

Country Link
JP (1) JPS5845175B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58144471A (en) * 1982-02-19 1983-08-27 Ulvac Corp Apparatus for holding substrate in vacuum treating apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0213434Y2 (en) * 1984-09-25 1990-04-13
JP7161542B2 (en) * 2018-09-28 2022-10-26 株式会社アシックス shirt and pants

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58144471A (en) * 1982-02-19 1983-08-27 Ulvac Corp Apparatus for holding substrate in vacuum treating apparatus

Also Published As

Publication number Publication date
JPS5845175B2 (en) 1983-10-07

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