JPH023556B2 - - Google Patents

Info

Publication number
JPH023556B2
JPH023556B2 JP56076530A JP7653081A JPH023556B2 JP H023556 B2 JPH023556 B2 JP H023556B2 JP 56076530 A JP56076530 A JP 56076530A JP 7653081 A JP7653081 A JP 7653081A JP H023556 B2 JPH023556 B2 JP H023556B2
Authority
JP
Japan
Prior art keywords
type
film
insulating film
gate insulating
polysilicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56076530A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57192077A (en
Inventor
Katsuhiko Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56076530A priority Critical patent/JPS57192077A/ja
Publication of JPS57192077A publication Critical patent/JPS57192077A/ja
Publication of JPH023556B2 publication Critical patent/JPH023556B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP56076530A 1981-05-22 1981-05-22 Semiconductor device Granted JPS57192077A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56076530A JPS57192077A (en) 1981-05-22 1981-05-22 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56076530A JPS57192077A (en) 1981-05-22 1981-05-22 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS57192077A JPS57192077A (en) 1982-11-26
JPH023556B2 true JPH023556B2 (enrdf_load_stackoverflow) 1990-01-24

Family

ID=13607830

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56076530A Granted JPS57192077A (en) 1981-05-22 1981-05-22 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS57192077A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211779A (en) * 1981-06-23 1982-12-25 Nec Corp Field effect transistor
JPS641275A (en) * 1987-06-23 1989-01-05 Mitsubishi Electric Corp Semiconductor device

Also Published As

Publication number Publication date
JPS57192077A (en) 1982-11-26

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