JPH0234179B2 - - Google Patents
Info
- Publication number
- JPH0234179B2 JPH0234179B2 JP56147751A JP14775181A JPH0234179B2 JP H0234179 B2 JPH0234179 B2 JP H0234179B2 JP 56147751 A JP56147751 A JP 56147751A JP 14775181 A JP14775181 A JP 14775181A JP H0234179 B2 JPH0234179 B2 JP H0234179B2
- Authority
- JP
- Japan
- Prior art keywords
- groove
- film
- polycrystalline silicon
- oxidation
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/763—Polycrystalline semiconductor regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
- H01L21/743—Making of internal connections, substrate contacts
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14775181A JPS5850752A (ja) | 1981-09-21 | 1981-09-21 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14775181A JPS5850752A (ja) | 1981-09-21 | 1981-09-21 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5850752A JPS5850752A (ja) | 1983-03-25 |
| JPH0234179B2 true JPH0234179B2 (enrdf_load_stackoverflow) | 1990-08-01 |
Family
ID=15437317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14775181A Granted JPS5850752A (ja) | 1981-09-21 | 1981-09-21 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5850752A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4745081A (en) * | 1985-10-31 | 1988-05-17 | International Business Machines Corporation | Method of trench filling |
| US4767722A (en) * | 1986-03-24 | 1988-08-30 | Siliconix Incorporated | Method for making planar vertical channel DMOS structures |
| JPS63116445A (ja) * | 1986-11-04 | 1988-05-20 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
| US4835586A (en) * | 1987-09-21 | 1989-05-30 | Siliconix Incorporated | Dual-gate high density fet |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5525501A (en) * | 1978-08-04 | 1980-02-23 | Supensaa Hetsuzu Inc | Insert for ignition deck of internal |
-
1981
- 1981-09-21 JP JP14775181A patent/JPS5850752A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5850752A (ja) | 1983-03-25 |
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