JPH0234168B2 - - Google Patents

Info

Publication number
JPH0234168B2
JPH0234168B2 JP60141461A JP14146185A JPH0234168B2 JP H0234168 B2 JPH0234168 B2 JP H0234168B2 JP 60141461 A JP60141461 A JP 60141461A JP 14146185 A JP14146185 A JP 14146185A JP H0234168 B2 JPH0234168 B2 JP H0234168B2
Authority
JP
Japan
Prior art keywords
substrate
jets
spray
substrates
chemicals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60141461A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6129131A (ja
Inventor
Shii Baakuman Don
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EFU ESU AI CORP
Original Assignee
EFU ESU AI CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EFU ESU AI CORP filed Critical EFU ESU AI CORP
Publication of JPS6129131A publication Critical patent/JPS6129131A/ja
Publication of JPH0234168B2 publication Critical patent/JPH0234168B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/20—Jet mixers, i.e. mixers using high-speed fluid streams
    • B01F25/23—Mixing by intersecting jets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02—Spray pistols; Apparatus for discharge
    • B05B7/08—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
    • B05B7/0807—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets
    • B05B7/0846—Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets with jets being only jets constituted by a liquid or a mixture containing a liquid
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/16—Acidic compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Weting (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP14146185A 1984-07-02 1985-06-27 酸処理装置において基板に化学薬品を塗布する方法および装置 Granted JPS6129131A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/626,640 US4609575A (en) 1984-07-02 1984-07-02 Method of apparatus for applying chemicals to substrates in an acid processing system
US626640 1996-04-02

Publications (2)

Publication Number Publication Date
JPS6129131A JPS6129131A (ja) 1986-02-10
JPH0234168B2 true JPH0234168B2 (enExample) 1990-08-01

Family

ID=24511227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14146185A Granted JPS6129131A (ja) 1984-07-02 1985-06-27 酸処理装置において基板に化学薬品を塗布する方法および装置

Country Status (3)

Country Link
US (1) US4609575A (enExample)
JP (1) JPS6129131A (enExample)
DE (1) DE3523509A1 (enExample)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3735676C1 (de) * 1987-10-22 1988-12-22 Draegerwerk Ag Stroemungspruefer
DE8804860U1 (de) * 1988-04-13 1988-06-16 Bäurle, Heinz Vorrichtung zur Aufnahme mit Hochdruck-Wasser- bzw. -Dampfstrahl zu reinigender Teile
US5041229A (en) * 1988-12-21 1991-08-20 Board Of Regents, The University Of Texas System Aerosol jet etching
US4973379A (en) * 1988-12-21 1990-11-27 Board Of Regents, The University Of Texas System Method of aerosol jet etching
DE3903607A1 (de) * 1989-02-08 1990-08-09 Leybold Ag Vorrichtung zum reinigen, pruefen und einordnen von werkstuecken
JP2670835B2 (ja) * 1989-02-10 1997-10-29 日本シイエムケイ株式会社 微細パターン形成用エッチング方法とエッチング装置
US4900395A (en) * 1989-04-07 1990-02-13 Fsi International, Inc. HF gas etching of wafers in an acid processor
US5087323A (en) * 1990-07-12 1992-02-11 Idaho Research Foundation, Inc. Fine line pattern formation by aerosol centrifuge etching technique
DE9013668U1 (de) * 1990-09-29 1992-01-30 HAMATECH Halbleiter-Maschinenbau und Technologie GmbH, 7137 Sternenfels Vorrichtung für die Halbleitertechnik
US5232328A (en) * 1991-03-05 1993-08-03 Semitool, Inc. Robot loadable centrifugal semiconductor processor with extendible rotor
DE9103494U1 (de) * 1991-03-21 1992-07-16 HAMATECH Halbleiter-Maschinenbau und Technologie GmbH, 7137 Sternenfels Vorrichtung zur Belackung von Substraten
US5316035A (en) * 1993-02-19 1994-05-31 Fluoroware, Inc. Capacitive proximity monitoring device for corrosive atmosphere environment
DE69608669T2 (de) * 1995-12-19 2001-03-01 Cornell Research Foundation, Inc. Stromloses aufbringen von metallfilmen mit sprayprozessor
US5861064A (en) * 1997-03-17 1999-01-19 Fsi Int Inc Process for enhanced photoresist removal in conjunction with various methods and chemistries
US6265020B1 (en) * 1999-09-01 2001-07-24 Shipley Company, L.L.C. Fluid delivery systems for electronic device manufacture
US6340395B1 (en) * 2000-01-18 2002-01-22 Advanced Micro Devices, Inc. Salsa clean process
JP3662484B2 (ja) * 2000-08-09 2005-06-22 エム・エフエスアイ株式会社 ウェット処理方法及びウェット処理装置
DE10115376B4 (de) * 2001-03-28 2006-03-16 EISENMANN Fördertechnik GmbH & Co. KG Anlage zum Pulverlackieren von Gegenständen
US6589595B2 (en) * 2001-04-13 2003-07-08 Chemtek, Inc. Method and apparatus for preventing asphalt from sticking to paving equipment
US6685815B2 (en) 2002-01-14 2004-02-03 Applied Materials Inc. Electroplating of semiconductor wafers
JP4459565B2 (ja) * 2003-07-07 2010-04-28 日清紡ホールディングス株式会社 静電塗装装置
US7798764B2 (en) 2005-12-22 2010-09-21 Applied Materials, Inc. Substrate processing sequence in a cartesian robot cluster tool
US7371022B2 (en) 2004-12-22 2008-05-13 Sokudo Co., Ltd. Developer endpoint detection in a track lithography system
US7699021B2 (en) 2004-12-22 2010-04-20 Sokudo Co., Ltd. Cluster tool substrate throughput optimization
US7819079B2 (en) 2004-12-22 2010-10-26 Applied Materials, Inc. Cartesian cluster tool configuration for lithography type processes
US7651306B2 (en) 2004-12-22 2010-01-26 Applied Materials, Inc. Cartesian robot cluster tool architecture
KR101255048B1 (ko) 2005-04-01 2013-04-16 에프에스아이 인터내쇼날 인크. 하나 이상의 처리 유체를 이용하여 마이크로일렉트로닉 워크피이스를 처리하는데 이용되는 장치용 배리어 구조 및 노즐 장치
JP5194259B2 (ja) * 2006-07-07 2013-05-08 ティーイーエル エフエスアイ，インコーポレイティド 液体エーロゾル式パーティクル除去方法
JP2009543338A (ja) 2006-07-07 2009-12-03 エフエスアイ インターナショナル インコーポレーテッド １つ以上の処理流体によりマイクロエレクトロニクス半製品を処理するために用いられる道具において使われる隔壁構造およびノズル装置
KR101060664B1 (ko) * 2007-08-07 2011-08-31 에프에스아이 인터내쇼날 인크. 하나 이상의 처리유체로 전자소자를 처리하는 장비의 배리어 판 및 벤튜리 시스템의 세정방법 및 관련 장치
US8235062B2 (en) * 2008-05-09 2012-08-07 Fsi International, Inc. Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation
US11244841B2 (en) * 2017-12-01 2022-02-08 Elemental Scientific, Inc. Systems for integrated decomposition and scanning of a semiconducting wafer
WO2021211429A1 (en) 2020-04-16 2021-10-21 Elemental Scientific, Inc. Systems for integrated decomposition and scanning of a semiconducting wafer

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE249678C (enExample) *
US2249205A (en) * 1934-05-12 1941-07-15 American Anode Inc Method and apparatus for applying temporary protective coatings to articles
US3027869A (en) * 1957-01-11 1962-04-03 Cleanola Company Spray apparatus for applying coatings
US2956900A (en) * 1958-07-25 1960-10-18 Alpha Metal Lab Inc Nickel coating composition and method of coating
GB1278268A (en) * 1968-08-05 1972-06-21 Colin Clayton Mayers Method and apparatus for polishing glassware
US4161356A (en) * 1977-01-21 1979-07-17 Burchard John S Apparatus for in-situ processing of photoplates
JPS53146574A (en) * 1977-05-27 1978-12-20 Hitachi Ltd Etching method for semiconductor element
JPS585107B2 (ja) * 1978-12-27 1983-01-29 ワイケイケイ株式会社 小物品の塗装装置
US4286541A (en) * 1979-07-26 1981-09-01 Fsi Corporation Applying photoresist onto silicon wafers
US4425868A (en) * 1981-12-28 1984-01-17 Thatcher Glass Corporation Coating hood

Also Published As

Publication number Publication date
JPS6129131A (ja) 1986-02-10
DE3523509A1 (de) 1986-02-27
US4609575A (en) 1986-09-02
DE3523509C2 (enExample) 1993-05-19

Similar Documents

Publication Publication Date Title
JPH0234168B2 (enExample)
US4682615A (en) Rinsing in acid processing of substrates
US3990462A (en) Substrate stripping and cleaning apparatus
CN101802975B (zh) 在用于通过一种或多种处理流体来处理微电子工件的工具中的阻挡板和文氏管容纳系统的漂洗方法以及相关装置
JP4005326B2 (ja) 基板処理装置および基板処理方法
EP3811400B1 (en) System and method for self-cleaning wet treatment process
JPS63136528A (ja) 処理液塗布装置
CN101009206B (zh) 基板处理装置及基板处理方法
CN114823431B (zh) 一种用于清洗晶圆的喷射装置
KR20180049472A (ko) 헬멧 세척장치
KR101188293B1 (ko) 2가지 유체의 분사 노즐 장치
US12106976B2 (en) Steam-assisted single substrate cleaning process and apparatus
US4801335A (en) Rinsing in acid processing of substrates
KR100991128B1 (ko) 기판 처리장치
JPH10328059A (ja) 浴室の洗浄装置
JPH08224510A (ja) ロボット洗浄装置及びロボット洗浄装置用ノズル
KR20070076527A (ko) 기판 처리 장치 및 기판 처리 방법
US20030221712A1 (en) Shower tubing for PRS wet bench
JP4484861B2 (ja) 基板洗浄装置
JPS6121755A (ja) スプレー・ポスト
JPH01130773A (ja) 金属線条の洗浄装置
JP2862918B2 (ja) 薬液処理装置
JP2007200996A (ja) 基板の処理装置及び処理方法
JPH09287874A (ja) 被処理物の液切り方法
KR20230138321A (ko) 기판 처리 장치