JPS53146574A - Etching method for semiconductor element - Google Patents
Etching method for semiconductor elementInfo
- Publication number
- JPS53146574A JPS53146574A JP6115277A JP6115277A JPS53146574A JP S53146574 A JPS53146574 A JP S53146574A JP 6115277 A JP6115277 A JP 6115277A JP 6115277 A JP6115277 A JP 6115277A JP S53146574 A JPS53146574 A JP S53146574A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor element
- etching method
- nozzle
- shorten
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To shorten the etching time as well as to ensure a high dielectric strength for the semiconductor element by providing plural pairs of the etching solution nozzle, the demineralized water nozzle and the drying nozzle respectively.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6115277A JPS53146574A (en) | 1977-05-27 | 1977-05-27 | Etching method for semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6115277A JPS53146574A (en) | 1977-05-27 | 1977-05-27 | Etching method for semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53146574A true JPS53146574A (en) | 1978-12-20 |
Family
ID=13162852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6115277A Pending JPS53146574A (en) | 1977-05-27 | 1977-05-27 | Etching method for semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53146574A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4609575A (en) * | 1984-07-02 | 1986-09-02 | Fsi Corporation | Method of apparatus for applying chemicals to substrates in an acid processing system |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5129090A (en) * | 1974-09-06 | 1976-03-11 | Hitachi Ltd | HANDOTAISOSHINOETSUCHINGUHOHO |
-
1977
- 1977-05-27 JP JP6115277A patent/JPS53146574A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5129090A (en) * | 1974-09-06 | 1976-03-11 | Hitachi Ltd | HANDOTAISOSHINOETSUCHINGUHOHO |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4609575A (en) * | 1984-07-02 | 1986-09-02 | Fsi Corporation | Method of apparatus for applying chemicals to substrates in an acid processing system |
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