JPH0233049Y2 - - Google Patents
Info
- Publication number
- JPH0233049Y2 JPH0233049Y2 JP17369285U JP17369285U JPH0233049Y2 JP H0233049 Y2 JPH0233049 Y2 JP H0233049Y2 JP 17369285 U JP17369285 U JP 17369285U JP 17369285 U JP17369285 U JP 17369285U JP H0233049 Y2 JPH0233049 Y2 JP H0233049Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- room
- adhesive
- dust
- floor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 claims description 25
- 230000001070 adhesive effect Effects 0.000 claims description 20
- 239000000853 adhesive Substances 0.000 claims description 18
- 238000009423 ventilation Methods 0.000 claims description 10
- 239000002313 adhesive film Substances 0.000 claims description 9
- 238000004887 air purification Methods 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 2
- 230000003749 cleanliness Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17369285U JPH0233049Y2 (US07902200-20110308-C00004.png) | 1985-11-12 | 1985-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17369285U JPH0233049Y2 (US07902200-20110308-C00004.png) | 1985-11-12 | 1985-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6283127U JPS6283127U (US07902200-20110308-C00004.png) | 1987-05-27 |
| JPH0233049Y2 true JPH0233049Y2 (US07902200-20110308-C00004.png) | 1990-09-06 |
Family
ID=31111393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17369285U Expired JPH0233049Y2 (US07902200-20110308-C00004.png) | 1985-11-12 | 1985-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0233049Y2 (US07902200-20110308-C00004.png) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5146423B2 (ja) * | 2009-07-30 | 2013-02-20 | 新日鐵住金株式会社 | 炭化珪素単結晶製造装置 |
| JP5186512B2 (ja) * | 2010-01-19 | 2013-04-17 | 株式会社ベッセル工業 | 除電除塵装置 |
| JP7102033B2 (ja) * | 2021-07-15 | 2022-07-19 | 株式会社西部技研 | クリーンブース |
-
1985
- 1985-11-12 JP JP17369285U patent/JPH0233049Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6283127U (US07902200-20110308-C00004.png) | 1987-05-27 |
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