JPH0232111B2 - - Google Patents
Info
- Publication number
- JPH0232111B2 JPH0232111B2 JP60060456A JP6045685A JPH0232111B2 JP H0232111 B2 JPH0232111 B2 JP H0232111B2 JP 60060456 A JP60060456 A JP 60060456A JP 6045685 A JP6045685 A JP 6045685A JP H0232111 B2 JPH0232111 B2 JP H0232111B2
- Authority
- JP
- Japan
- Prior art keywords
- polished
- surface plate
- carrier
- rack
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 claims description 24
- 230000033001 locomotion Effects 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 18
- 239000000969 carrier Substances 0.000 description 7
- 230000004308 accommodation Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60060456A JPS61219568A (ja) | 1985-03-25 | 1985-03-25 | 一定位置停止研磨方法及び装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60060456A JPS61219568A (ja) | 1985-03-25 | 1985-03-25 | 一定位置停止研磨方法及び装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61219568A JPS61219568A (ja) | 1986-09-29 |
JPH0232111B2 true JPH0232111B2 (de) | 1990-07-18 |
Family
ID=13142786
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60060456A Granted JPS61219568A (ja) | 1985-03-25 | 1985-03-25 | 一定位置停止研磨方法及び装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61219568A (de) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6195876A (ja) * | 1984-10-18 | 1986-05-14 | Toshiba Corp | 研磨機におけるキヤリア位置決め方法 |
-
1985
- 1985-03-25 JP JP60060456A patent/JPS61219568A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6195876A (ja) * | 1984-10-18 | 1986-05-14 | Toshiba Corp | 研磨機におけるキヤリア位置決め方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS61219568A (ja) | 1986-09-29 |
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