JPH0231278Y2 - - Google Patents

Info

Publication number
JPH0231278Y2
JPH0231278Y2 JP1985113766U JP11376685U JPH0231278Y2 JP H0231278 Y2 JPH0231278 Y2 JP H0231278Y2 JP 1985113766 U JP1985113766 U JP 1985113766U JP 11376685 U JP11376685 U JP 11376685U JP H0231278 Y2 JPH0231278 Y2 JP H0231278Y2
Authority
JP
Japan
Prior art keywords
slit
aperture
knife edge
laser
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985113766U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6163391U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985113766U priority Critical patent/JPH0231278Y2/ja
Publication of JPS6163391U publication Critical patent/JPS6163391U/ja
Application granted granted Critical
Publication of JPH0231278Y2 publication Critical patent/JPH0231278Y2/ja
Expired legal-status Critical Current

Links

JP1985113766U 1985-07-26 1985-07-26 Expired JPH0231278Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985113766U JPH0231278Y2 (de) 1985-07-26 1985-07-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985113766U JPH0231278Y2 (de) 1985-07-26 1985-07-26

Publications (2)

Publication Number Publication Date
JPS6163391U JPS6163391U (de) 1986-04-30
JPH0231278Y2 true JPH0231278Y2 (de) 1990-08-23

Family

ID=30672791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985113766U Expired JPH0231278Y2 (de) 1985-07-26 1985-07-26

Country Status (1)

Country Link
JP (1) JPH0231278Y2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010188370A (ja) * 2009-02-17 2010-09-02 Aisin Seiki Co Ltd レーザ加工装置及びレーザ加工方法

Also Published As

Publication number Publication date
JPS6163391U (de) 1986-04-30

Similar Documents

Publication Publication Date Title
JP2657957B2 (ja) 投影装置及び光照射方法
KR880004610A (ko) 레이저 스크라이빙 장치와 방법
JPH0231278Y2 (de)
JP3071227B2 (ja) 帯状シートの穿孔装置
GB2041639B (en) Electron beam lithography
JPS6039181Y2 (ja) レ−ザ加工装置
JPH0231277Y2 (de)
JP3656371B2 (ja) 光加工装置
JPH0697648B2 (ja) 電子ビーム露光装置
JPS5824111A (ja) 光ビ−ム偏向・走査装置
JP2658192B2 (ja) 金属板へ円形パターンを作成する方法
JPH0241423B2 (de)
JP2000288766A (ja) レーザ加工装置
JPS62154729A (ja) 電子線描画装置
JP3642839B2 (ja) レーザーマーキング方法
JP3526199B2 (ja) 光加工機及びそれを用いたオリフィスプレートの製造方法
JPH0356155B2 (de)
JPS61255022A (ja) 電子ビ−ム露光方法
JPH10305551A (ja) 製版装置
JPH02297986A (ja) ビームの均一化方法並びに均一化したビームの伝送装置および照射装置
JP2866866B2 (ja) レーザ光整形装置
JP2000173094A (ja) 光ディスク用原盤の製造方法及び光ディスク用原盤の製造装置
JPH0333246B2 (de)
JPS61254346A (ja) レ−ザマ−キング装置
JPH0511454A (ja) ホログラム描画装置